Airbag polishing system for large-diameter special-shaped off-axis aspherical mirror and its working method

Abstract

Airbag polishing system for large-diameter special-shaped off-axis aspherical mirror and its working method, using a mirror grinding machine as a carrier, the polishing system is composed of a numerical control system, an airbag polishing device and a counterweight structure, and the airbag polishing device is composed of a flexible airbag and a double swing head structure. , The counterweight floating structure is used to hang on the front end of the counterweight rod, and it always floats on the polished mirror surface with a fixed pressure, and is fed linearly in the X and Y directions under the drive of the CNC guide rail; the airbag polishing device is composed of polishing servo motor, hollow spindle, airbag Clamping head, square bushing, upper and lower bearing seats; double swing head structure consists of L-shaped bracket, C-shaped bracket, C-axis servo motor and precision planetary reducer, A-axis servo motor and precision planetary reducer; Polished servo motor The hollow main shaft is driven to rotate by the synchronous pulley, thereby driving the flexible airbag to rotate. The invention can effectively eliminate the problems of the size limitation of the polished mirror surface and the low precision existing in the horizontal structure and the gantry structure of other polishing system structures.

Description

technical field [0001] The invention relates to a polishing system, in particular to an airbag polishing system suitable for a large-diameter special-shaped off-axis aspherical mirror. The invention also relates to a method of operation of such a polishing system. Background technique [0002] At present, large-diameter special-shaped off-axis aspheric surfaces are widely used in the field of space optics and astronomy. Its shape is generally rounded rectangle, stadium shape, octagonal shape and other shapes (called special shapes) as shown in Figure 1. How to develop high-quality large-aperture special-shaped off-axis aspheric optical components is of great significance to the development of space optics and astronomical optics. Over the years, domestic and foreign scholars have invented a variety of polishing methods in order to obtain high-precision aspherical optical surfaces: classical tape repairing method, computer-controlled optical surface forming technology, ion ...

AI Technical Summary

Problems solved by technology

[0004] Disadvantages: ①The convergence efficiency of grinding and polishing is low; ②The grinding and polishing of small grinding discs is very easy to cause medium and high frequency errors on the optical mirror; ③There is an edge effect; ④The small grinding disc is always perpendicular to the contact area of ​​the optical mirror during the polishing process, and the linear velocity of the center point of the contact area is zero, and the farther away from the contact center, the greater the linear velocity and the greater the grinding removal amount. It is necessary to introduce revolution motion to improve the shape of the removal model, and the structure of the polishing head is complex

[0006] Disadvantages: The removal efficiency of magnetorheological polishing is low. Before the application of magnetorheological polishing technology, the mirror surface to be polished needs to be pre-polished by other polishing methods. The surface accuracy must basically meet the requirements before using magnetorheological polishing technology.

[0008] Disadvantages: ①The material removal efficiency is low, the mirror surface needs to be pre-polished by other polishing methods before polishing, and the surface shape accuracy must basically meet the requirements before using the ion beam polishing method

②The equipment is expensive and the operating cost is high

[0015] Disadvantages: Although the IRP series airbag polishing equipment has excellent performance, the price is very expensive and the technology is strictly confidential

[0017] Disadvantages: Although the precision of the trial-produced experimental prototype can meet the requirements of ultra-precision polishing, due to structural limitations, the equipment is only suitable for small and medium-caliber optical components

[0018] Disadvantages: It is oriented to the polishing of free-form surface molds, and is not suitable for ultra-precision polishing of large-diameter off-axis aspheric optical components

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