Detection method for detection device, control system, detection system, and program
A technology of detection equipment and detection method, applied in the field of detection systems, can solve the problems of complex flow path structure and the like
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[0022] (1) Summary
[0023] The drawings to be referred to in the following description of the embodiments are all schematic representations. That is, the dimensional (including thickness) ratios of the respective constituent elements shown on the drawings do not always reflect their actual dimensional ratios.
[0024] The detection method according to the present embodiment is the detection method of the detection device 1 . Such as figure 1 As shown in , the detection device 1 has a detection chamber 10 that forms a part (flow path L1 ) of a flow path of a gas (sample gas). The detection device 1 is configured to detect chemical species present in a gas in a detection chamber 10 . That is, the detection device 1 further includes a sensor 11 provided in the detection chamber 10 and configured to detect a chemical substance contained in the sample gas. The detection device 1 further includes an adsorption part 12 disposed in the detection chamber 10 and configured to adsor...
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