A metal-based flexible frame quartz differential resonant pressure sensor

Abstract

A metal-based flexible frame quartz differential resonant pressure sensor, including an integrated metal pressure differential conversion element, the integrated metal pressure differential conversion element is connected with two quartz double-end fixed support tuning forks, and the integrated metal pressure differential The upper side of the conversion element and the outer side of the two quartz double-ended solid support tuning forks are connected with an upper cap to form a vacuum seal; the lower side of the integrated metal pressure differential conversion element is connected with a lower cover, which seals the PCB installation chamber, completing the common Airtight; two quartz double-ended stubborn tuning forks are vertically crossed and installed on the left and right sides of the flexible frame. The frequency change of the quartz double-ended stubborn tuning fork can obtain the pressure information to be measured, which can not only improve the sensitivity, but also suppress conjugate interference such as temperature drift. It has the characteristics of digital signal output, high precision, and strong anti-interference ability.

Description

technical field [0001] The invention belongs to the technical field of micromechanical electronics (MEMS) digital pressure sensors, and in particular relates to a metal-based flexible frame quartz differential resonance pressure sensor. Background technique [0002] In the field of resonant pressure sensors, the sensor structure is divided into a pressure conversion unit and a resonance unit; the pressure conversion unit generally uses a pressure-sensitive film, bellows, etc., in order to form a differential output structure to suppress the conjugate interference of the sensor, and often Introducing mechanical signal transmission structures such as cantilever beams and flexible levers, additional structures require additional connection designs, alignment accuracy and connection strength will affect the overall accuracy and reliability of the sensor, and if the pressure conversion structure of different materials will cause thermal instability match, further disturbing the p...

AI Technical Summary

Problems solved by technology

[0002] In the field of resonant pressure sensors, the sensor structure is divided into a pressure conversion unit and a resonance unit; the pressure conversion unit generally uses a pressure-sensitive film, bellows, etc., in order to form a differential output structure to suppress the conjugate interference of the sensor, and often Introducing mechanical signal transmission structures such as cantilever beams and flexible levers, additional structures require additional connection designs, alignment accuracy and connection strength will affect the overall accuracy and reliability of the sensor, and if the pressure conversion structure of different materials will cause thermal instability match, further disturbing the performance of the pressure sensor

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