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Calibration institutions and testing systems

A technology of calibrating mechanism and mechanical arm, applied in the field of inspection, can solve the problem of time-consuming and labor-intensive, and achieve the effect of accurate and fast acquisition

Active Publication Date: 2022-08-09
SKYVERSE TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the carrying device is set in the chamber, it is time-consuming and labor-intensive to determine the position information of the carrying device by disassembling the entire detection equipment.

Method used

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  • Calibration institutions and testing systems
  • Calibration institutions and testing systems
  • Calibration institutions and testing systems

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Embodiment Construction

[0026] The embodiments of the present application will be further described below with reference to the accompanying drawings. The same or similar reference numbers refer to the same or similar elements or elements having the same or similar functions throughout the drawings.

[0027] In addition, the embodiments of the present application described below in conjunction with the accompanying drawings are exemplary, only used to explain the embodiments of the present application, and should not be construed as limitations on the present application.

[0028] In this application, unless otherwise expressly stated and defined, a first feature "on" or "under" a second feature may be in direct contact with the first and second features, or the first and second features indirectly through an intermediary touch. Also, the first feature being "above", "over" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simp...

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Abstract

The application discloses a calibration mechanism and a detection system. The calibration mechanism includes a main body, a first extension part and a second extension part. The first extension part is arranged at the first end of the body, and the first extension part includes a first clamping part, and the first clamping part is used for matching with the avoidance space of the bearing part. The second extension part is disposed at the second end opposite to the first end of the main body, the first end of the second extension part is closer to the main body than the second end of the second extension part, and the second extension part has a through-hole The accommodating cavity extending from the second end of the two extending parts to the first end of the second extending part, on a plane perpendicular to the extending direction of the accommodating cavity, the projection of the accommodating cavity is located in the projection of the first clamping piece. The present application uses the accommodating cavity on the second extension of the calibration mechanism to determine the position information of the avoidance space on the carrier, which is more convenient, faster and more accurate than directly measuring the avoidance space of the carrier after disassembling the entire device. to obtain the location information of the carrier.

Description

technical field [0001] The present application relates to the field of detection technology, and more particularly, to a calibration mechanism and a detection system. Background technique [0002] Generally, in the wafer inspection equipment, the wafer carrying device is generally arranged in a closed chamber, so as to facilitate the inspection of the wafer carried thereon. However, since the bearing device is arranged in the chamber, it is time-consuming and laborious when the entire detection device needs to be disassembled to determine the position information of the bearing device. SUMMARY OF THE INVENTION [0003] Embodiments of the present application provide a calibration mechanism and a detection system. [0004] The calibration mechanism of the embodiment of the present application includes a main body, a first extension portion and a second extension portion. The first extension part is disposed at the first end of the body, and the first extension part include...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D21/00G01D11/00
CPCG01D21/00G01D11/00Y02P70/50
Inventor 陈鲁张龙黄有为张嵩
Owner SKYVERSE TECH CO LTD
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