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A low-cost vacuum coating target

A vacuum coating, low-cost technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of vacuum leakage of the tube body, reduce the overall cost, and cannot distinguish the use state of the target, and achieve Improve the safety of use, reduce the overall cost, and improve the effect of short target life

Active Publication Date: 2022-05-17
深圳市千禾盛科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the present invention provides a low-cost vacuum coating target, which adds low-cost materials as the inner liner, and adopts a transition layer structure, which effectively solves the vacuum leakage of the tube body that may occur during the use of the tube target And the situation where the use status of the target cannot be distinguished, greatly reducing the overall cost of the product

Method used

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  • A low-cost vacuum coating target

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Effect test

Embodiment 1

[0044] Such as figure 1 The shown embodiment 1 of the present invention discloses a low-cost vacuum coating target, which includes a target body tube, a transition layer and a liner tube that are sequentially socketed from outside to inside; the hollow structure of the liner tube forms a cooling pipeline.

[0045] Among them, the two ends of the target tube are provided with threaded structures, which can be connected with the coating chamber of the coating equipment through the threaded structure, which is convenient for disassembly and connection; and the outer diameter of the target tube is 160mm, the wall thickness is 10mm, and the length is 1600mm. The material is pure zirconium.

[0046] The inner liner is made of 6061 aluminum alloy with an outer diameter of 139.5mm, a thickness of 6mm and a length of 1600mm.

[0047] The transition layer is made of graphite foil nested with a thickness of 0.5mm.

[0048] Moreover, the two ends of the target tube, the transition layer...

Embodiment 2

[0057] Such as figure 1 As shown, Embodiment 2 of the present invention provides a low-cost vacuum coating target, including a target body tube, a transition layer, and a liner tube that are sequentially socketed from outside to inside; the hollow structure of the liner tube forms a cooling pipeline; After the target tube and the liner tube are sequentially socketed through the transition layer, they are rolled and calendered to obtain the final size of the product.

[0058] Among them, the two ends of the target tube are provided with threaded structures, which can be connected with the empty coating cavity of the coating equipment through the threaded structure, which is convenient for disassembly and connection; and the outer diameter of the target tube is 160mm, the thickness is 10mm, and the length is 1600mm, and the material is pure titanium;

[0059] The lining pipe is made of Q235 seamless steel, with an outer diameter of 136mm, a thickness of 3mm, and a length of 160...

Embodiment 3

[0069] Such as figure 1 As shown, Embodiment 3 of the present invention provides a low-cost vacuum coating target, including a target body tube, a transition layer, and a liner tube that are sequentially socketed from outside to inside; the hollow structure of the liner tube forms a cooling pipeline; After the target tube and the liner tube are sequentially socketed through the transition layer, they are rolled and calendered to obtain the final size of the product.

[0070] Among them, the two ends of the target tube are provided with threaded structures, which can be connected with the empty coating cavity of the coating equipment through the threaded structure, which is convenient for disassembly and connection; and the outer diameter of the target tube is 160mm, the thickness is 10mm, and the length is 1600mm, and the material is pure niobium;

[0071] The lining pipe is made of 304 seamless stainless steel, with an outer diameter of 136mm, a thickness of 3mm, and a lengt...

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Abstract

The invention discloses a low-cost vacuum coating target, which comprises a target body tube, a transition layer and an inner liner tube which are sequentially socketed from outside to inside; pipe joints are arranged at both ends of the target body tube, and can be connected with coating equipment through the pipe joints ; The two ends of the target tube, the transition layer and the lining tube are sealed and connected; the hollow structure of the lining tube forms a cooling pipeline. Among them, a low-cost material is added as the lining tube, and a transition layer structure is adopted, which effectively solves the possible vacuum leakage of the tube body and the inability to distinguish the use status of the target during the use of the tube target, and greatly reduces the comprehensiveness of the product. cost.

Description

technical field [0001] The invention relates to the technical field of tubular targets for magnetron sputtering, in particular to a low-cost vacuum coating target. Background technique [0002] At present, in the field of magnetron sputtering vacuum coating, compared with planar targets and multi-arc targets, seamless target tubes have the advantages of high target utilization and uniform films. Rare metals such as niobium, zirconium, titanium, and tantalum have different special properties. Physical properties are important coating materials. Among them, the Nb produced by niobium in the process of magnetron sputtering 2 0 5 It is an electrochromic material with excellent performance, and the film has a high refractive index, which is similar to Si0 2 Films with different refractive indices can be prepared with the same combination, so Nb205 films are more and more widely used, and the demand for niobium targets is also increasing; metals such as zirconium and titanium h...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34
CPCC23C14/3407
Inventor 张法亮单丹丹张法治
Owner 深圳市千禾盛科技有限公司