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Mask adapter, mask adapter attachment tool, exposure device, and device production method

A technology of exposure device and adapter, which is applied in the direction of photolithography exposure device, semiconductor/solid-state device manufacturing, electrical components, etc.

Pending Publication Date: 2021-08-31
NIKON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the exposure mask is used with such a mask holding member attached, it becomes a problem to improve the exposure accuracy of the exposure device

Method used

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  • Mask adapter, mask adapter attachment tool, exposure device, and device production method
  • Mask adapter, mask adapter attachment tool, exposure device, and device production method
  • Mask adapter, mask adapter attachment tool, exposure device, and device production method

Examples

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Embodiment Construction

[0055] Hereinafter, a mask adapter and a mask adapter mounting tool according to an embodiment of the present invention will be described with reference to the drawings.

[0056] In addition, the scope of this invention is not limited to the following embodiment, It can change arbitrarily within the range of the technical idea of ​​this invention. In addition, in the following drawings, in order to make each structure easy to understand, the scale, number, etc. of each structure may differ from the scale, number, etc. of an actual structure.

[0057] In addition, the Z-axis direction shown suitably in each figure is the up-down direction which makes a positive side an upper side, and makes a negative side a lower side. The X-axis direction and the Y-axis direction are directions perpendicular to the up-down direction (Z-axis direction), and are horizontal directions perpendicular to each other. In the following description, the direction parallel to the Z-axis direction is re...

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PUM

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Abstract

This mask adapter is used in an exposure device that illuminates a mask supported on a stage and exposes a pattern formed in the mask, on to a substrate. The mask adapter is attached to the mask and comprises: a main body having a support section that supports the mask outside a region in which the pattern has been formed and a supported section supported by the stage; and a first section for detection, upon the main body and detectable by a detection unit in the exposure device. The first section for detection includes information pertaining to the mask adapter.

Description

technical field [0001] The invention relates to a mask adapter, a mask adapter installation tool, an exposure device and a component manufacturing method. [0002] This application claims priority based on Japanese Patent Application No. 2019-020167 filed on February 6, 2019, the contents of which are incorporated herein by reference. Background technique [0003] For example, Patent Document 1 describes a mask holding member attached to an exposure mask used in an exposure apparatus. When using an exposure mask with such a mask holding member attached, it becomes a problem to improve the exposure precision of an exposure apparatus. [0004] prior art literature [0005] patent documents [0006] Patent Document 1: Japanese Patent Laid-Open No. 11-288099 Contents of the invention [0007] One aspect of the mask adapter of the present invention is a mask adapter used in an exposure device for illuminating a mask supported on a stage to expose a pattern formed on the mas...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20H01L21/673
CPCH01L21/673G03F7/20G03F7/7085G03F7/70691H01L21/6734
Inventor 小宫山弘树八田澄夫长野智和寺西瀬名浅海博圭高桥大辅大川智之
Owner NIKON CORP
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