Accelerometer and temperature self-compensation method thereof

Abstract

An embodiment of the invention discloses an accelerometer and a temperature self-compensation method of the accelerometer. The accelerometer comprises a resonator, an electrostatic force loading module, a sensitive mass block, a lever structure and an interface circuit, wherein the electrostatic force loading module comprises an electrostatic force regulation and control module, an electrostatic force loading device and a switch; the electrostatic force loading device is located at the center of the sensitive mass block; the sensitive mass block is connected with the resonator through a lever structure; and the resonator comprises a resonant beam, a driving electrode and a detection electrode, and the driving electrode and the detection electrode are connected with the interface circuit. According to the accelerometer, an adjustable electrostatic force is introduced, temperature self-compensation is carried out according to the frequency temperature properties of the accelerometer, an external temperature sensitive element is not needed, the problem of inaccurate temperature measurement caused by uncertain temperature field distribution and time delay of heat conduction can be solved, and higher-precision temperature compensation is realized; therefore, the output acceleration value of the accelerometer is more accurate.

Description

technical field [0001] The invention relates to the technical field of computers, in particular to an accelerometer and a temperature self-compensation method for the accelerometer. Background technique [0002] Accelerometer is a kind of inertial device in Micro Electro Mechanical System (MEMS), which has been widely concerned because of its high measurement accuracy and high sensitivity. The resonant accelerometer is an inertial device that is sensitive to the acceleration information of the moving carrier by detecting the change of the output frequency of the resonant beam. Its sensitive structure is made of MEMS bulk silicon technology. The frequency signal can be directly connected to the digital circuit, and the transmission process has strong anti-interference ability. , and a large dynamic range. [0003] The resonant accelerometer is highly sensitive to temperature. When the internal heat dissipation of the device and the external temperature change slightly, it wi...

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Problems solved by technology

[0006] 3. In the process of processing, the residual stress generated due to technological reasons will affect the working state of the sensor with the change of temperature, etc.

In the existing silicon microresonant accelerometer temperature self-compensation method, it is often necessary to calibrate the coefficients of acceleration and temperature, that is, matrix calculation is required, which requires a large amount of calculation and takes a long time

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