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A non-contact optical profile measurement method and device

A profile measurement, non-contact technology, used in the field of optical precision detection, can solve the problems of limited measurement size, low measurement efficiency, low measurement accuracy, etc., and achieve the effect of high measurement efficiency, strong versatility and high accuracy

Active Publication Date: 2022-04-22
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In order to overcome the existing technical problems, this application provides a non-contact optical profilometry solution to solve the problem that existing optical profilometers do not have versatility, low measurement accuracy, limited measurement size, and measurement efficiency. low level problem

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  • A non-contact optical profile measurement method and device
  • A non-contact optical profile measurement method and device
  • A non-contact optical profile measurement method and device

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Embodiment Construction

[0076] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

[0077] Such as Figure 1 to Figure 3 As shown, the first aspect of the present invention provides a non-contact optical profile measuring device, the device includes a rotary pair, a rotary pair driver, an angle sensor, a linear displacement sensor, a guide rail pair, a guide rail auxiliary driver, and a measurement sensor for a measured object Support (29), spherical reference mirror (20), spherical reference mirror support (21) and bottom base (3);

[0078] The turning pair includes a main shaft turning pair (13), a first turning pair (9) and a second turning pair (11), and the turning pair driver includes ...

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Abstract

The invention provides a non-contact optical profile measurement method and device, the device includes a rotating pair, a rotating pair driver, an angle sensor, a linear displacement sensor, a guide rail pair, a guide rail auxiliary driver, a measurement sensor bracket, a spherical reference mirror, a spherical Reference mirror bracket and bottom base; the mechanical system involved in the device of the present invention includes two-dimensional linear motion and three-dimensional rotation, and the mechanical system drives the high-precision measurement sensor and the measured piece to move according to the predetermined trajectory, and then completes the measured piece Measurement of contours. The measuring method of the invention has the advantages of strong versatility, high measuring efficiency, high accuracy and the like.

Description

technical field [0001] The invention relates to the field of optical precision detection, in particular to a non-contact optical profile measurement method and device. Background technique [0002] With the continuous improvement of optical design capabilities and people's requirements for optical system performance, more and more optical systems use aspheric and free-form optical components. Compared with spherical optical components, it has many advantages. Using aspheric surfaces in the system can not only reduce the number of optical components, reduce the quality of the instrument, reduce the size of the system, simplify the structure of the system, but also help to correct aberrations and improve the quality of the system. Imaging quality; therefore, aspheric optical elements are widely used in modern optical systems. [0003] Existing methods for profile measurement of optical components mainly include interferometry, contact measurement, and non-contact measurement....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/24G01B11/2441
Inventor 王建立糜小涛陈琦杨永强王之一陈宝刚明名张玉良
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI