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Sample pre-tilt loading device for ebsd experiments

A technology for loading devices and samples, which is applied to measuring devices, material analysis using wave/particle radiation, instruments, etc. Effect

Active Publication Date: 2021-12-17
CHINALCO MATERIALS APPL RES INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention provides a sample pre-tilt loading device for EBSD experiments to solve the problems of low accuracy of sample installation and experimental results in the prior art

Method used

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  • Sample pre-tilt loading device for ebsd experiments
  • Sample pre-tilt loading device for ebsd experiments
  • Sample pre-tilt loading device for ebsd experiments

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Embodiment Construction

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0030] Such as Figure 1 to Figure 4 As shown, the present invention provides a sample pre-tilt loading device for EBSD experiments, and the sample pre-tilt loading device includes a frame body 10 , a loading assembly 20 and a driving mechanism 30 . Wherein, the loading assembly 20 includes a base 2...

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Abstract

The invention provides a sample pre-tilt loading device for EBSD experiments, comprising: a frame; the loading assembly includes a base and a loading unit, the base is detachably arranged on the frame, and the base has sequentially connected placement part, reference part and connection part, the connection part is used to connect with the test device, the reference part has an inclined reference surface, the placement part has a placement cavity and an opening communicating with the placement cavity, the opening and the inclined reference surface are located on the same side of the base, and the loading The unit has a rotating state of rotating relative to the placement chamber and a moving state of moving relative to the placement chamber. The loading unit has a loading surface, which is set toward the opening and used to place samples; the driving mechanism is arranged on the frame and connected with the loading unit. The mechanism is used to adjust the position of the sample on the base, so that the sample detection surface and the inclined reference surface are on the same plane. Through the technical solution provided by the present application, the problems of low accuracy of sample installation and experimental results in the prior art can be solved.

Description

technical field [0001] The invention relates to the technical field of sample loading devices, in particular to a sample pre-tilt loading device for EBSD experiments. Background technique [0002] At present, when testing the microscopic texture of the Electron Backscatter Diffraction Pattern (EBSD), the sample needs to be placed on the plane of the electron beam focus of the scanning electron microscope, and the test area on the upper surface of the sample is kept at an inclination angle of 70 degrees from the horizontal plane, so that the sample carry out testing. In the prior art, the sample is usually fixed on a pre-tilted sample stage, and the X, Y, and Z axes of the scanning electron microscope are moved so that the electron beam emitted by the scanning electron microscope is irradiated on the surface of the sample along a preset angle. Experimenting with the above-mentioned scheme cannot automatically find the pre-tilt plane for the sample, and requires visual observ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/20008G01N23/20016G01N23/20058G01N23/203G01N23/2206G01N23/2251
CPCG01N23/20008G01N23/20016G01N23/20058G01N23/203G01N23/2206G01N23/2251
Inventor 董学光王立娟赵经纬王眉眉邹立颖谷宁杰范荣辉田宇兴
Owner CHINALCO MATERIALS APPL RES INST CO LTD
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