System and method for laser micro-nano processing of pattern
A micro-nano processing and laser technology, applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problem of long processing time, and achieve the effect of good processing effect and time saving.
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[0025] The present invention will be further described below in conjunction with drawings and embodiments.
[0026] see figure 1 , one A system for laser micro-nano processing graphics, including: a solid laser micro-nano processing platform and a host computer. The solid laser micro-nano processing platform includes a femtosecond laser 1, an optical gate 2, a half-wave plate 3, a Glan prism 4, and a first rectangular Mirror 5, second right-angle mirror 6, third right-angle mirror 7, lens 8 and three-dimensional displacement stage 9; femtosecond laser 1, optical gate 2, half-wave plate 3, Glan prism 4, right-angle mirror and the first The right-angle reflector 5 is arranged successively on the same horizontal axis, the first right-angle reflector 5 and the second right-angle reflector 6 are arranged on the same vertical axis, and the reflecting surfaces of the first right-angle reflector 5 and the second right-angle reflector 6 are parallel , the second right-angle reflecto...
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