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Pressure sensor, preparation method thereof and pressure detection system

A technology of pressure sensor and detection system, which is applied in the direction of fluid pressure measurement, instrument, and measurement force using capacitance changes, which can solve the problems of high compression modulus, small deformation, and low conversion rate of sensors, so as to increase overload pressure and improve Effect of pressure range

Pending Publication Date: 2021-11-23
成都蕊感微电子有限公司
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Problems solved by technology

But on the other hand, materials with high elastic limit also have high compressive modulus, the deformation is small under the same pressure, and the sensor conversion rate is low

Method used

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  • Pressure sensor, preparation method thereof and pressure detection system
  • Pressure sensor, preparation method thereof and pressure detection system
  • Pressure sensor, preparation method thereof and pressure detection system

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Embodiment Construction

[0050] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0051] In describing the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " The orientation or positional relationship indicated by "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientation shown in the drawings Or positional relationship is only for the convenience of describing the present inve...

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Abstract

The invention provides a pressure sensor, a preparation method thereof and a pressure detection system. The pressure sensor comprises a first electrode layer, a second electrode layer, a first elastic dielectric layer and an anti-rolling structure, wherein the first elastic dielectric layer is located between the first electrode layer and the second electrode layer, and the first elastic dielectric layer has a first tensile modulus; and the anti-rolling structure is configured to limit the extension deformation of the first elastic dielectric layer in the direction perpendicular to the pressure when the first elastic dielectric layer is subjected to the pressure. According to the pressure sensor, the extension deformation of the elastic dielectric layers in the XY plane direction is limited by the anti-rolling structure, so that the elastic compression limits of the elastic dielectric layers in the Z-axis direction are increased, and the purposes of improving the overload pressure of the pressure sensor and increasing the range are achieved.

Description

technical field [0001] The present application relates to the technical field of pressure detection, in particular to a pressure sensor, a preparation method thereof, and a pressure detection system. Background technique [0002] There are two main types of pressure sensors: one is based on the piezoresistive or piezoelectric effect, which is converted into pressure according to the piezoresistive coefficient or piezoelectric coefficient of the material by measuring the change of resistance or voltage; the other is based on the relationship between capacitance and electrode distance. The principle of inverse ratio, by measuring the deformation, it is converted into pressure and pressure according to the compressive modulus of the medium material. [0003] For capacitive pressure sensors, once the material deforms beyond the elastic limit and undergoes irreversible plastic deformation, the corresponding relationship between capacitance and pressure will be changed, making the...

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Application Information

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IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/142G01L9/12Y02T10/40
Inventor 李扬渊
Owner 成都蕊感微电子有限公司
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