Pressure sensor, preparation method thereof and pressure detection system
A technology of pressure sensor and detection system, which is applied in the direction of fluid pressure measurement, instrument, and measurement force using capacitance changes, which can solve the problems of high compression modulus, small deformation, and low conversion rate of sensors, so as to increase overload pressure and improve Effect of pressure range
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[0050] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.
[0051] In describing the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " The orientation or positional relationship indicated by "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner" and "outer" are based on the orientation shown in the drawings Or positional relationship is only for the convenience of describing the present inve...
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