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Fixtures, Scanning Electron Microscopes and Electron Beam Exposure Machines

A fixed device and electron optics technology, applied in the field of electron optics, can solve the problem of inability to meet high-precision observation and ultra-close working distance, and achieve the effect of satisfying high-precision observation and reducing vertical space

Active Publication Date: 2022-07-08
KYKY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0005] In view of this, the present application provides a backscattered electron detector fixing device to solve the problem of fixing the backscattered electron detector by a telescopic rod in the prior art. In order to ensure the normal operation of the telescopic rod, it cannot meet the requirements of high-precision observation. The problem of ultra-short working distance

Method used

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  • Fixtures, Scanning Electron Microscopes and Electron Beam Exposure Machines
  • Fixtures, Scanning Electron Microscopes and Electron Beam Exposure Machines

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Embodiment Construction

[0017] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0018] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, only for the purpose of It is convenient to describe the application and to simplify the description, rather than indicating or implying that the device or element re...

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Abstract

The application provides a fixing device, a scanning electron microscope and an electron beam exposure machine. The fixing device provided in the present application is directly fixed under the electronic optical system, and there is no need to adjust the position during use, so there is no need to reserve the vertical space required for the adjustment of the position. Since the vertical space occupied by the backscatter detector is reduced, the working distance between the electron optical system and the sample stage can be close enough to meet the needs of high-precision observation.

Description

technical field [0001] The present application relates to the technical field of electron optics, in particular to a fixing device, a scanning electron microscope and an electron beam exposure machine. Background technique [0002] Scanning electron microscopes and electron beam exposure machines are both electron-optical instruments. Scanning electron microscopes and electron beam exposure machines often use backscattered electron detectors to observe the surface morphology of samples and analyze sample components. [0003] The commonly used backscattered electron detector is fixed on a telescopic rod, and the telescopic rod is inserted into the electron optical system from the side of the sample chamber. The objective lens pole piece in the electron optical system is relatively fragile and may be damaged if it collides with the backscattered electron detector. Therefore, between the electron optical system and the sample stage, it is necessary to reserve a space where th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/244H01J37/28H01J37/317
CPCH01J37/244H01J37/28H01J37/3174
Inventor 李文龙
Owner KYKY TECH
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