104 results about "Electron optics" patented technology

The utility model belongs to the technical field of heat dissipation of electronic optical equipment, and discloses a heat dissipation structure for multi-hotspot heat dissipation of a high-density electronic device and the electronic optical equipment. The heat dissipation structure comprises a shell and a fluid dredging piece, the shell is provided with a cavity used for containing the fluid dredging piece and a plurality of heating components, the surface of the shell is provided with a fluid inlet and a fluid outlet, the inner wall face of the cavity is provided with a plurality of heat dissipation through grooves, and the heat dissipation through grooves are connected to the corresponding heating components in a heat transfer mode. The two ends of each heat dissipation through groove communicate with the fluid inlet and the fluid outlet correspondingly, and the fluid dredging pieces are arranged on heat dissipation paths of the heat dissipation through grooves. Under the driving of the fluid dredging piece and the guiding of the heat dissipation through groove, the heat conduction fluid can efficiently flow in the heat dissipation through groove, and heat is discharged from the fluid outlet, so that heat dissipation and rapid cooling of multiple hot spots can be accurately, rapidly and effectively realized, the use performance, the safety and the stability of a high-density electronic device are improved, and the service life of the electronic device is prolonged. And meanwhile, the production cost and the manufacturing difficulty can be reduced.

The invention relates to the technical field of electronic scanning imaging, in particular to a scanning electron microscope and an electron optical structure thereof. According to the scheme, the anode of the electron gun is arranged behind the focusing lens and in front of the scanning coil, and the acceleration structure is arranged between the cathode and the anode, so that the acceleration structure is connected with the power supply during application, the acceleration structure is used as the acceleration electrode, and electrons can be accelerated between the cathode and the acceleration electrode after being emitted from the cathode, so that the acceleration effect is improved. The electron optical structure is arranged between the accelerating electrode and the anode, the electron decelerates between the accelerating electrode and the anode, high energy is kept in the accelerating structure, it is guaranteed that electrons are kept at a high speed in the propagation process, and unexpected deflection of the electrons in the electron optical structure is reduced; therefore, the electron beam falling on the surface of the sample has relatively low energy, so that the anti-interference performance of the electron beam in the propagation process can be ensured, and the low-voltage imaging of the electron beam on the surface of the sample can also be ensured.

The invention discloses an electron beam exposure machine and a write field distortion correction method thereof. The correction method comprises the following steps: confirming a mark position on a wafer; generating first scanning data comprising coordinates of a plurality of ideal points, and generating a plurality of moving positions of the wafer moved by the displacement table based on the mark position and the parameters of the writing field; the displacement platform successively moves the wafer according to a plurality of moving positions, after the wafer is moved each time, an electron beam is emitted according to the scanning voltage of one ideal point in the first scanning data, and a distortion point corresponding to the ideal point is formed by scanning and imaging in a writing field on the wafer; a plurality of distortion points are formed by scanning in a writing field on the wafer after the displacement table moves successively according to the plurality of moving positions and is scanned and imaged successively, and the coordinates of the plurality of distortion points are in one-to-one correspondence with the coordinates of the plurality of ideal points; one writing field is divided into a plurality of correction units, and each correction unit at least comprises four distortion points located at corners; for each correction unit, based on a preset correction algorithm, calculating a correction parameter set according to the coordinates of the four distortion points at the four corners and the coordinates of the corresponding ideal points; the displacement table moves the wafer, so that the exposure area of the wafer is aligned with the electronic optical system; obtaining coordinates of each target point on the layout in a writing field; on the basis of a correction algorithm, coordinates of scanning points corresponding to the target points are calculated according to the coordinates of the target points and a correction parameter set of a correction unit, and second scanning data are formed; and emitting electron beams according to the second scanning data to form the layout.

The present application relates to a kind of shutter wheel remote sensing wide imaging system and imaging method, including multiple optical camera lenses, motor drive mechanism, wheel shutter mechanism, multiple lens shared electronic optical sensor device, wherein, the wheel shutter mechanism is placed between camera lens and electronic optical sensor device, the shutter rotation of wheel shutter mechanism is driven by motor drive mechanism to control the light transmission of different camera lenses to electronic optical sensor device in turn, realize the wide imaging of area array camera lens.The present application provides the imaging method of the above-mentioned imaging system, improves the imaging width under the condition of not upgrading camera lens configuration, only uses a set of electronic device to reduce the development cost and installation difficulty.

The present application relates to the technical field of electron-optical imaging, and particularly relates to a backscattered electron scintillator detector device and a detection method, which comprises a backscattered electron receiving sensor, an optical condensing group, an optical transmission group, a photoelectric conversion system and a detector protection mechanism. By using a scintillator as a sensor, a backscattered electron signal generated by an industrial electron gun electron beam is received, and then the electronic information carried by the backscattered electron is converted into an optical signal and transmitted to an area far away from the workpiece. Finally, a high signal-to-noise ratio voltage analog signal is formed by the photoelectric conversion system, avoiding the influence of spatial noise and other interference signals on weak signal transmission in the existing analog signal transmission process. For detailed topographic features, a backscattered electron image with high resolution can be displayed.

The invention relates to a charged particle optical plate for a charged particle optical device for projecting a charged particle beam along a beam path to a sample location. A charged particle optical plate includes: a substrate having a crystal structure having a crystal symmetry line; a plurality of channels configured for passing a plurality of beam paths of a beam grid through the substrate; and a plurality of multipoles associated with a respective channel, each multipole comprising a plurality of electrodes for the associated channel, where the electrodes are arranged such that a geometric symmetry line of the multipole is parallel to a respective crystal symmetry line of the crystal structure.

A display device including a display area and an optical area overlapping an electronic optical device disposed below optical area; a plurality of light emitting devices disposed in the display area and the optical area; a first pixel circuit disposed in the display area and outside of the optical area and electrically connected to first light emitting devices disposed in the optical area and configured to provide a driving current to the first light emitting devices disposed in the optical area; and a second pixel circuit disposed in the display area and outside of the optical area and electrically connected to second light emitting devices disposed in the display area and configured to provide a driving current to the second light emitting devices disposed in the display area.

The invention provides a method, a device and equipment for realizing miniaturization of an electronic optical system of a klystron, which can be applied to the technical field of vacuum electronic devices. The method for realizing miniaturization of the electron optical system of the klystron comprises the following steps: acquiring a first target parameter of an electron gun and an initial permanent magnet focusing system; according to the first magnetic induction intensity, the magnetic induction intensity area range of the initial permanent magnet focusing system is adjusted, and a first magnetic induction intensity curve is obtained; adjusting the initial structure parameters by simulating a working state of embedding an electron gun corresponding to the initial structure parameters into the middle permanent magnet focusing system to obtain a second magnetic induction intensity curve; and embedding the electron gun corresponding to the target structure parameter corresponding to the second magnetic induction intensity curve into the target permanent magnet focusing system to obtain the electron optical system of the target speed regulation tube.

The invention relates to the field of electronic optical automatic design, in particular to a spline and topological optimization-based rapid design method for an axisymmetric electron gun. The design space of the axisymmetric electron gun is divided into a cathode region, an anode region, a focusing electrode region and a spacer region, the anode region and the focusing electrode region are uniformly divided into a plurality of rectangular pixel blocks by using a pixel division method, the anode region and the focusing electrode region are divided by using a cathode estimation method, scattered pixel points are randomly generated in the regions, and the pixel points are distributed in the regions. Connecting the scattering points through an NURBS spline, searching a pixel block through which a spline curve passes, extracting the outer contour of the pixel block, generating continuous and non-hollow electrodes, and combining the continuous and non-hollow electrodes into a complete electron gun; and the shape and voltage of the electrode are optimized by using an optimization algorithm, and finally, the electron gun meeting the design requirements is obtained. The problem of topological optimization design of an existing electronic gun is solved, the limitation of the problems of model defects and the like of an existing electronic gun design method is broken through, and automatic design of the electronic gun is achieved.

The utility model relates to a kind of detector components, including detector, diaphragm and adjusting mechanism.Detector is used to detect signal electron beam, diaphragm is located in the side of detector receiving signal electron beam, the center is provided with through-hole, adjusting mechanism can adjust the area of through-hole and / or the distance between diaphragm and detector.In addition, the utility model also discloses an electron-optical system, including electron beam source, beam separator and detector component.Electron beam source emits main electron beam to sample along main optical axis, and generates signal electron beam on sample surface;Beam separator is coaxially arranged with main optical axis, located between electron beam source and sample, for deflecting signal electron beam.Through adjusting the area of diaphragm through-hole and the distance between diaphragm and detector, the signal electron beam detection of different diffusion angle can be realized, meet the accurate detection demand of different aspect ratio characteristics, applicable to the characterization of complex topography sample.

The utility model provides a packaging box for electronic optical lens cones, which comprises a box body, a box cover, a box cover and a box cover, and an equipment cavity for accommodating the electronic optical lens cones is arranged in the box body; the controller is arranged on the box body and is configured to be electrically connected with a vacuumizing device of the electron optical lens cone so as to control the vacuumizing device; and the power supply device is arranged on the box body and is configured to supply power to the controller and the vacuumizing device. According to the packaging box, in the transportation process of electronic optical lens cones such as the electronic optical lens cones, on the basis that the safety of hardware structures is guaranteed, the influence of external interference on the lens cones, especially vibration interference, can be greatly reduced; in addition, the electronic optical lens cone can effectively guarantee high vacuum for a long time, so that a machine can be quickly reset at a client conveniently, the installation time is shortened, and the recognition degree at the client is enhanced.

The utility model relates to the technical field of antibacterial performance detection, in particular to a composite resin tooth antibacterial performance detection device which comprises a composite resin tooth detection box, a base is fixedly installed at the bottom of the inner side of the composite resin tooth detection box, a detection glass cup is placed on the upper side of the base, and a back plate is installed on the rear side of the composite resin tooth detection box. An antibacterial detection mechanism is mounted on the back plate; the antibacterial detection mechanism comprises a lampshade which is fixedly mounted on the inner side of the back plate, light supplementing lamps are fixedly mounted on the periphery of the inner side of the lampshade, two electronic optical microscopes are symmetrically and fixedly mounted in the middle of the inner side of the lampshade, and a control host is fixedly mounted on the outer side of the back plate. According to the utility model, the antibacterial detection mechanism is arranged, point electronic pictures fed back by the electron optical microscope are analyzed by utilizing the control host, and the ratio of the content of bacteria in a mixed solution of the composite resin teeth to the content of bacteria in a mixed solution of artificial teeth is calculated, so that the antibacterial performance of the composite resin teeth can be specifically obtained.

A charged particle-optical assembly configured to direct a plurality of beams of charged particles in a beam grid towards a sample location, the charged particle-optical assembly including: a planar charged particle-optical element configured to operate at a voltage on charged particle beams of a beam grid, the charged particle-optical element including a plurality of apertures for the paths of different beams of the beam grid; a conductive body electrically connected to the charged particle-optical element, wherein a recess is defined within the conductive body and is configured to provide a field free volume for insertion of an electrical coupling to electrically connect the charged particle-optical element via the electrical coupling with an electrical power source; and an electrical insulator covering at least part of a surface of the conductive body, the surface facing away from the charged particle-optical element.

The invention discloses an electron beam focusing parameter adaptive calibration method based on regional recursive splitting and analytic field guidance, and belongs to the technical field of electron beam equipment precision control. In order to solve the problems of low full-field uniform sampling efficiency and poor sparse sampling precision in large-view-field electron beam processing, the invention provides a dual-drive adaptive sampling strategy. According to the method, a theoretical curvature distribution diagram is constructed by using an electron optical analytical field to serve as prior guidance, and a distortion sensitive area in a view field is identified according to a multi-dimensional feature fusion criterion of physical prior, differential field nonlinearity and an actual measurement form; a recursive regional geometric subdivision structure is adopted to perform recursive splitting and encrypted sampling on the sensitive region, and narrow window rapid search is realized in combination with a parameter inheritance strategy; and finally, reconstructing a full-field high-precision model based on a scattered data interpolation algorithm. According to the method, sparse sampling can be automatically carried out in the smooth field curvature change region, encryption sampling can be carried out in the severe distortion region, and the calibration efficiency is remarkably improved on the premise of ensuring high focusing precision.

A multi-beam electron-optical system for a charged-particle assessment tool, the system comprising: a plurality of control lenses, a plurality of objective lenses and a controller. The plurality of control lenses are configured to control a parameter of a respective sub-beam. The plurality of objective lenses are configured to project one of the plurality of charged-particle beams onto a sample. The controller controls the control lenses and the objective lenses so that the charged particles are incident on the sample with a desired landing energy, demagnification and / or beam opening angle.

An electron beam application apparatus includes: an optical system configured to irradiate a sample with excitation light; an electron optical system configured to project, onto a camera, a photoelectron image formed by photoelectrons emitted from the sample irradiated with the excitation light; and a control unit. The optical system includes a light source configured to generate the excitation light and a pattern forming unit. The excitation light forms an optical pattern on a surface of the sample when the pattern forming unit is turned on, and the excitation light is emitted to the sample without forming the optical pattern on the surface of the sample when the pattern forming unit is turned off. The control unit adjusts the electron optical system based on feature data of a bright and dark pattern formed by the optical pattern in the photoelectron image obtained by turning on the pattern forming unit.

An industrial camera (20) comprises a printed circuit board (28) connected to an electrical connector (30). The printed circuit board (28) comprises at least a first circuit portion (28a-28e) configured to accommodate electronic optical control components, dedicated to controlling a deformable optical element (32), and at least a second circuit portion (28f-28i) configured to accommodate electronic interface components, which implement a serial interface. Some pins of the electrical connector (30) are connected to both the at least one first circuit portion and the at least one second circuit portion, so as to alternatively realize both control outputs of the deformable optical element (32) and control outputs of the serial interface.

This invention discloses a high-speed loading and unloading device for electronic optical products and a rotary printing equipment. The loading and unloading device includes a jig disk moving assembly and a loading and unloading rotating assembly. The jig disk moving assembly includes a jig disk fixing component connected to a spatial three-axis moving module. The loading and unloading rotating assembly includes a rotating support rod connected to a rotary drive module. With the rotation axis of the rotating support rod as the center of symmetry, picking heads are respectively set at symmetrical positions at both ends of the rotating support rod via picking lifting components. One picking head of the loading and unloading rotating assembly picks up the electronic optical product to be loaded from the product jig disk at the loading position, while the other picking head simultaneously picks up the electronic optical product that has completed the execution process from the execution station. The high-speed loading and unloading device for electronic optical products of this invention has fast loading and unloading speed and precise positioning, and, in conjunction with the rotary printing equipment, realizes a high-precision, high-speed, and automated printing process for electronic optical products.

A system for characterizing a structure having microscopic dimensions, comprising: (i) an electron optics system configured to illuminate the structure with an X-ray beam having an X-ray beam energy close to but not exceeding the k-edge energy of a chemical element in the structure; (ii) at least one detector: an X-ray photoelectron spectroscopy (XPS) detector that collects an XPS signal generated by the illumination of the structure; or an X-ray fluorescence (XRF) detector that collects an XRF signal generated by the illumination of the structure; and (iii) a computing device configured to determine chemical element information regarding the amount and concentration of the chemical element in the structure based on at least one of the XPS signal or the XRF signal.

The application relates to a preparation method of a focus-controllable X-ray tube, and belongs to the technical field of X-rays, solving the problems of low CT imaging quality of X-rays generated by the existing X-ray tube and poor focus adjustment flexibility. The method comprises the following steps: preparing an electron beam generator, a focusing device, a lens assembly, a target material assembly and a tube body; the lens assembly comprises two electron optical lenses; the prepared electron beam generator, the focusing device, the lens assembly and the target material assembly are sequentially fixed in the tube body; when the lens assembly is fixed, the first electron optical lens is first fixed, then the second electron optical lens is arranged at a position with a preset distance from the first electron optical lens, and the second electron optical lens is rotated so that the pole plate with the opposite polarity to the pole plate of the first electron optical lens is aligned in the axial direction of the tube body. The micro-focus X-rays generated by the prepared X-ray tube have a more circular focus and higher adjustment flexibility.

In one example, a method includes determining a feature displacement gradient (DG) tensor characterizing a deformation feature. The method includes, in an iterative routine, calculating an objective function value associated with a trial DG tensor, the calculating based at least in part on pixel values within an automatically determined ZOC, where the ZOC is based at least in part on the trial DG tensor. In another example, a method includes determining one or more rotational transformation components corresponding to a test image, and determining a feature DG tensor based at least in part on the rotational transformation components. In another example, a system includes an electro-optical assembly, a detector assembly, and a controller programmed to determine a feature DG tensor. In another example, a non-transitory computer-readable medium stores instructions that, when executed by a computer, cause the computer to perform a method of determining a deformation characteristic.

Objective lens array assemblies and associated methods are disclosed. In one arrangement, the objective lens array assembly focuses a multi-beam of sub-beams on a sample. Planar elements define a plurality of apertures aligned along sub-beam paths. An objective lens array projects the multi-beam towards a sample. Apertures of one or more of the planar elements compensate for off-axis aberrations in the multi-beam.

This invention discloses an optical auxiliary positioning system for an electron beam scanning imaging device. Located between the electron optical system and the optical camera, it includes an optical structure that shortens the offset between the electron beam scanning area and the optical detection area. The optical structure comprises a focusing module, a lens module, and a base module. Light generated by the light source is absorbed and reflected by the base module before illuminating the wafer. The wafer generates imaging light carrying texture information, which, after being reflected twice by the lens module and the base module, enters the optical camera for imaging. The system allows for rapid and accurate adjustment of the focal length to adapt to the surface morphology of wafers with different thicknesses, ensuring stable detection performance of the electron beam scanning imaging device under complex process conditions.

The invention relates to a method for operating a computed tomography device (150), wherein the computed tomography device (150) comprises at least one x-ray radiation source (131) configured for generating x-ray radiation cones (132) for irradiating an object (134), wherein the computed tomography device (150) comprises at least one detector (136) configured for detecting the x-ray radiation of the x-ray radiation cones (132) that have interacted with the object (134), wherein the x-ray radiation source (131) comprises at least one electron optic arrangement (138) configured for variably arranging at least one electron beam (140) onto a plurality of positions of focal spots on at least one target comprised by the x-ray radiation source (131) in a manner that a plurality of different x-ray radiation cones (132) emerging from the focal spots is generated in order to image different portions of the object (134); the method comprising:performing a projection image scanning sequence (PSS) by using an imaging focal spot pattern in order to generate a plurality of projection images, wherein the imaging focal spot pattern comprises a plurality of x-ray focal spot positions on the at least one target (144) such that a volume of the object (134) to be reconstructed is irradiated by the different x-ray radiation cones (132);performing a tomographic scanning sequence (TSS) by performing the projection image scanning sequence (PSS) at differing viewing angles;performing an image reconstruction algorithm using the projection images in order to reconstruct a 3D-image of the object (134).The invention further relates to a computed tomography device (150), a computer program and a computer-readable storage medium. The invention may be employed in order to extend the field of view for a specific viewing angle.

The application discloses a kind of hydrophobic wear-resistant high-transmittance films and preparation methods thereof, the hydrophobic wear-resistant high-transmittance film includes the functional layer and the support layer of lamination;Support layer includes at least one of polycarbonate, polyethersulfone, thermoplastic polyurethane, cyclic olefin polymer;Functional layer includes polyethylene terephthalate and nano oligomeric silsesquioxane;The content of nano oligomeric silsesquioxane is 1% to 5% of the total mass of functional layer, including at least one of tri-silanol isooctyl-POSS, tri-silanol phenyl-POSS, octaphenyl-POSS and dodecaphenyl-POSS;Hydrophobic wear-resistant high-transmittance film is prepared by multilayer co-extrusion, light transmittance is above 80%, water contact angle is greater than 100°.The hydrophobic wear-resistant high-transmittance film of the application has excellent wear resistance, hydrophobicity, self-cleaning and high transparency, and is particularly suitable for consumer electronics, optical equipment, building materials and automotive industry and other fields.

This invention discloses an open-tube miniature X-ray tube with adjustable anode and its experimental evaluation platform, belonging to the field of miniature micro-focal spot X-ray tube technology. The system comprises an open-tube miniature X-ray tube system and an experimental platform. The open-tube miniature X-ray tube system includes a hot cathode filament, an electrostatic lens focusing system, and an anode target. The experimental evaluation system includes a vacuum chamber and interfaces for electrical input and vacuum input that cooperate with the vacuum chamber. The anode-cathode distance can be adjusted using the positioning holes on the electron optics system. The experimental evaluation system fixes the electron optics system and provides the necessary experimental conditions such as a high vacuum environment, accelerating voltage, and heating current. This invention enables open-tube experiments with adjustable anode for miniature X-ray tubes. Compared to closed-tube experiments, open-tube experiments facilitate adjustments to the miniature tube design and reduce experimental costs.

One embodiment provides a device including an electronic optic comprising an initiation component. The initiation component is triggered via an activation object located external to the electronic optic. The initiation component, when triggered, causes activation of the electronic optic. A movement of the electronic optic from a first position to a second position includes a movement with respect to the activation object and causes the triggering of the initiation component. Other aspects are described and claimed.

Voxel-Interface 3D Printing (VI3DP) enables comprehensive control over extruded voxel interfaces irrespective of the printhead diameter that conventionally dictates feature size. The present invention includes various optical, mechanical, and electrical functionalizations, attaining interface thicknesses up to three orders of magnitude smaller than the voxel size. Notable applications include encoding data in soft matter through fluorescent interfaces, creating tight fits and movable mechanisms through non-adhesive interfaces, fabricating bio-inspired composites with tailored failure modes, and developing a single filament capacitive touch sensor. VI3DP opens new avenues for enhanced functionality and efficiency across multiple fields, including biomedical technology, electronics, optics, and nanotechnology.

The invention discloses a multi-stage purification process of quartz micro powder, and belongs to the technical field of mineral processing. The process comprises the following steps: sequentially carrying out coarse crushing and fine crushing on quartz raw ore, and then carrying out hydraulic classification; performing high-gradient magnetic separation and superconducting magnetic separation on the graded quartz micro powder to remove impurities; adding a composite organic acid solution for acid leaching after magnetic separation; fluoride-free flotation is carried out after acid leaching; performing ultrasonic treatment after flotation; and finally drying and screening to obtain the quartz micro powder. According to the process, various impurities in the quartz micro-powder, especially impurities in crystal lattices, can be effectively removed through multi-stage cooperative treatment, the purity is improved, hydrofluoric acid is avoided, pollution is reduced, energy consumption and cost are reduced, and the process is suitable for meeting the requirements of the fields of electronics, optics and the like for the high-purity quartz micro-powder.

The invention discloses a co-packaging optical chip optical interconnection structure based on a micro-LED (Light Emitting Diode). Relates to the field of electron optics. Comprising two SOC chips, the two SOC chips are installed on two PCBs respectively, and the two sides of each PCB are each provided with a PD array and a micro-LED array; the PD array and the micro-LED array are respectively provided with a coupling port, and the coupling port of the micro-LED array on one PCB is connected with the coupling port of the PD array on the other PCB through an optical fiber; according to the invention, the two SOC chips are respectively installed on the PCB, the micro-LED array and the PD array are integrated, optical interconnection is realized by using the optical fiber, the problems of large size, complex thermal management and metal interconnection signal attenuation of a traditional laser are solved, and the device has the advantages of reducing the device size, reducing the thermal management complexity, increasing the number of integrated channels and reducing signal attenuation.