High-capacity etching equipment

Abstract

The invention discloses high-productivity etching equipment, which comprises a product feeding part, a reaction device, a product discharging part and a flower basket, wherein an upper reaction tank and a lower reaction tank are respectively arranged in the reaction device in the vertical direction, and an upper transmission roller and a lower transmission roller are respectively arranged on the upper reaction tank and the lower reaction tank; a liquid storage tank is arranged in the reaction device and located below the lower reaction tank, reaction liquid pipelines are arranged on the left side face and the right side face of the reaction device, the lower ends of the reaction liquid pipelines are connected into the liquid storage tank, and the upper portions of the reaction liquid pipelines are communicated with the upper reaction tank and the lower reaction tank respectively; the product feeding part and the product discharging part are respectively provided with a frontconveying belt and a rearconveying belt; the rear end of the front conveying belt is connected with the front ends of the two front movable conveying plates through a front movable center, and the front end of the rear conveying belt is connected with the rear ends of the two rear movable conveying plates through a rear movable center. According to the high-capacity etching equipment, the capacity output can be improved on the premise that the occupied area of the equipment is not changed, and capacity accumulation is avoided.

Description

technical field [0001] The invention relates to a large-capacity etching equipment, which belongs to the technical field of solar photovoltaic cell manufacturing. Background technique [0002] In the solar cell manufacturing process, the etching process belongs to the fourth process in the product process. The equipment manufacturing technology of this process is quite mature, but the equipment production capacity is stagnant. The current production capacity of etching equipment is generally 6000-7000 pieces / hour (8 tracks), which is lower than the production capacity of front-end processes such as texturing (8000 pieces / hour) and diffusion (8000 pieces / hour). Therefore, it is easy to cause capacity accumulation without additional equipment growth. [0003] The operation mode of all current etching equipment is generally consistent, which belongs to the single-layer linear flow operation, and the production capacity is single. Although the original 5-track (capacity of 4,...

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Problems solved by technology

Therefore, the increase in production capacity per unit area is not significant

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