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Image sensors comprising array of interference filters

A technology of image sensor and interference filter, applied in the field of image sensor

Pending Publication Date: 2022-01-11
COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, forming a shield on the backside of the substrate to protect the electronic components other than the photodetector from incident radiation may interfere with the fabrication of the pixelated filter.

Method used

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  • Image sensors comprising array of interference filters
  • Image sensors comprising array of interference filters
  • Image sensors comprising array of interference filters

Examples

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Embodiment Construction

[0045] In different figures, the same features are indicated by the same reference numerals. In particular, common structural and / or functional features between various embodiments may have the same reference numerals, and may be provided with the same structural, dimension and material properties. For the sake of clarity, only those steps and elements that are useful for understanding the embodiments described herein have been shown and described in detail. In particular, means for processing the signals supplied by the sensors described below are within the competence of a person skilled in the art and will not be described again.

[0046] In the following description, when reference is made to define an absolute position (such as the terms "front", "rear", "top", "bottom", "left", "right", etc.) or a relative position (such as the term " above", "below", "upper", "lower", etc.), or terms defining a direction (such as the terms "horizontal", "vertical", etc.), it refers to ...

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Abstract

The invention relates to an image sensors comprising an array of interference filters. The image sensor includes a substrate (12) including first portions (18) containing photodetectors (PH) adapted to capturing a radiation and second portions (19) containing electronic components located between come of the first portions; a pixelated filter (20) including filter pixels (PFIRCUT, PFIRBP), at least some of which include an interference filter (IRCUT) including a stack of planar layers (21, 22); and shields (40) reflecting or absorbing the radiation, covering the second portions and including walls (40) reflecting or absorbing the radiation and extending between filter pixels (PFIRCUT, PFIRBP) along at least a portion of the height of the pixelated filter.

Description

technical field [0001] The present disclosure relates to an image sensor including an array of interference filters, and a method of manufacturing such an image sensor. Background technique [0002] It is well known to form interference filter arrays in the visible, infrared (in particular for wavelengths from 650 nm to 1050 nm) and / or ultraviolet range, especially for image sensors (also called imagers), This requires separation of multiple frequency ranges. Such filter arrays are also called pixelated filters, filter pixels or elementary filters (corresponding to the smallest elements of a filter with the same filter characteristics). [0003] An example of application of a pixelation filter corresponds to a device including a sensor capable of acquiring color images and infrared images. The pixelated filter may then comprise first filter pixels that pass visible light and block infrared radiation, and second filter pixels that pass infrared radiation (in particular near...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146
CPCH01L27/14621H01L27/14623H01L27/14625H01L27/1464H01L27/14685H01L27/14605H01L27/14649H01L27/14645H01L27/14627H01L27/14629
Inventor 昆廷·阿巴迪弗朗索瓦·德诺维尔莉莲·马萨罗托杰罗姆·瓦扬
Owner COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES