An on-line detection device for tool chatter state

Abstract

The invention provides an on-line detection device for the flutter state of a tool, which includes a dual-frequency laser interferometer, a first beam splitting prism, a laser interferometer Y-direction measuring unit, a laser interferometer X-direction measuring unit, a third beam splitting prism, a two-dimensional A grating, a two-dimensional grating diffraction structure unit, a grating Z-direction displacement measuring unit, a grating Y-direction displacement measuring unit, a grating X-direction displacement measuring unit, a third reflector, a two-dimensional grating and a sixth reflector. The displacement of the third reflector and the sixth reflector is measured by the laser interferometer Y-direction measurement unit and the laser interferometer X-direction measurement unit, and the displacement is used as the displacement comparison data of the tool. Through the two-dimensional grating, the grating Z-direction displacement measurement unit, The grating Y-direction displacement measuring unit and the grating X-direction displacement measuring unit obtain basic tool displacement data based on the grating measurement principle, the two data are compared to obtain the tool chatter state, and the present invention has the advantage of high measurement accuracy.

Description

technical field [0001] The invention relates to the technical field of ultra-precision manufacturing of optical components, in particular to an on-line detection device for the flutter state of a tool. Background technique [0002] The scribing and manufacturing of gratings is an ultra-precise periodic microstructure processing process. When scribing the grating, the grating scribing tool presses and polishes the surface of the aluminum die according to the specific shape of its cutting edge, so as to form a process of periodic microstructure with a specific groove shape. Compared with other tools (such as turning tools, milling tools, etc.), the working state of the grating scribing tool has good stability, and the quantitative data of its chatter state is obtained by common means (such as vibration sensors, force sensors, current signals, etc.). or sound signal, etc.) is difficult to obtain directly and accurately. However, for the extrusion forming mechanism of the grat...

AI Technical Summary

Problems solved by technology

Compared with other tools (such as turning tools, milling cutters, etc.), the working state of the grating marking tool has good stability, and the quantitative data of its chatter state is obtained through common means (such as vibration sensors, force sensors, current signals, etc.) or sound signal, etc.) is difficult to obtain directly and accurately

However, for the extrusion forming mechanism of the grating, the interaction between the cutting edge and the aluminum film in a small range can bring about the flutter of the displacement in the micron scale or even the nanoscale, and due to the narrow space of the cutting edge and its special Principle of operation, specific sensors cannot be installed for direct measurement

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