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Metal mask plate and mask assembly

A metal mask and notch technology, applied in metal material coating process, ion implantation plating, coating and other directions, can solve the problems of easy deformation and affect the quality of the finished mask, so as to avoid mesh surface deformation, The effect of improving the accuracy of the net

Pending Publication Date: 2022-02-08
NANJING TOPTO MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, since the positions of the top corners of the metal mask are not easy to produce stretching deformation, a larger net tension will be used at these positions to make it produce a predetermined amount of deformation reserve (such as figure 1 , where the length of the arrow indicates the tension of the net at this position), but excessive tension will cause the mesh surface of the metal mask to be more easily deformed at each corner (such as figure 2 ), which in turn affects the quality of the finished mask

Method used

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  • Metal mask plate and mask assembly
  • Metal mask plate and mask assembly
  • Metal mask plate and mask assembly

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Embodiment Construction

[0030] In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0031] Below in conjunction with accompanying drawing and embodiment, the present invention will be further described:

[0032] refer to Figure 3 to Figure 6 As shown in , a metal mask in this embodiment has several opening patterns 1 regularly arranged in the middle of the metal mask, and the opening patterns 1 are through holes for the passage of evaporated film materials. , the above-mentioned regular arrangement refers to: all the...

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Abstract

The invention provides a metal mask plate and a mask assembly, and relates to the field of evaporation masks. According to the metal mask plate, the middle part of the metal mask plate is provided with a plurality of opening patterns which are regularly arranged; the metal mask plate is substantially rectangular, four edges of the metal mask plate are provided with notches which are recessed towards an inner side of a net surface of the metal mask plate, and the notches are used for deformation allowance of the metal mask plate during net stretching; and an edge of the notches starts from a vertex of a rectangle, and depths of the notches are gradually reduced from the middle of the notches to edges of two sides of the notches. The mask assembly comprises the metal mask plate. According to the invention, the specific notches are arranged on four edges of the metal mask plate to serve as the deformation allowance, so that net stretching pulling force needing to be provided for positions close to four corners of the metal mask plate in a net stretching process is reduced, and the drooping amount of the metal mask plate after net stretching is controlled while net face deformation caused by too large pulling force at the positions is avoided.

Description

technical field [0001] The invention relates to the technical field of evaporation masks, in particular to a metal mask plate and a mask component. Background technique [0002] The metal mask is one of the main fixtures in the evaporation process of AMOLED products, and the evaporation area is limited by the opening pattern on the mask. The production of the metal mask is through the stretching process. After the metal mask is stretched with a certain tension of the net, the mask is welded to the mask frame by laser to resist the drooping of the mesh surface caused by the gravity of the mesh surface. The amount, but the net tension itself will cause in-plane deformation of the mesh surface, which will affect the position accuracy of the mesh pattern. [0003] In the past, in order to solve the above-mentioned stretching deformation problem, a common practice is to use the same shrinkage ratio for the entire edge of the metal mask when setting the deformation allowance. In...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 钱超张蔡星李成林
Owner NANJING TOPTO MATERIALS CO LTD