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Three-axis gyroscope

A gyroscope and axis technology, applied in the field of three-axis gyroscope, can solve problems such as increasing inter-axis interference, and achieve the effects of avoiding device failure, reducing deviation, and suppressing quadrature error.

Active Publication Date: 2022-03-11
HANGZHOU SILAN MICROELECTRONICS
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  • Application Information

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Problems solved by technology

[0004] The commonly used gyroscope is a three-axis structure, which senses the angular velocity of the X / Y / Z axes respectively. In order to save area, the two sensing axes may share a movable mass, which inevitably increases the inter-axis interference.

Method used

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Embodiment Construction

[0038]Various embodiments of the invention will be described in more detail below with reference to the accompanying drawings. In the various drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale.

[0039] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0040] In describing the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", "inner", "outer" etc. indicate an orientation or position The relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constru...

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Abstract

The three-axis gyroscope comprises a substrate and a movable structure layer located on the substrate, the movable structure layer comprises a first driving frame and a second driving frame which are arranged in parallel along a first axis and are spaced by a preset distance, and the first driving frame and the second driving frame perform resonant motion in opposite directions along a second axis; the elastic frame is positioned in the center of the movable structure layer; the first sensing structures are located between the first driving frame and the second driving frame and symmetrically distributed on the two sides of the elastic frame in the second axis direction. The second sensing structures are symmetrically distributed on the two sides of the elastic frame in the first axis direction. The coupling structure is used for coupling the first sensing structure and the second sensing structure and controlling the running direction of the first sensing structure and the running direction of the second sensing structure to be perpendicular to each other; the first sensing structure is driven by the first drive frame and the second drive frame, and the second sensing structure is passively driven by the first sensing structure through the coupling structure. According to the three-axis gyroscope provided by the embodiment of the invention, the inter-axis interference and the orthogonal error are reduced.

Description

technical field [0001] The invention relates to the field of micro-electromechanical technology for detecting angular velocity, in particular to a three-axis gyroscope. Background technique [0002] The Micro-Electro-Mechanic System (MEMS) inertial sensor made by surface technology is a three-dimensional micro-mechanical structure prepared by multiple thin film deposition and pattern processing with a silicon wafer as the substrate. [0003] Silicon micro gyroscope is one of the commonly used devices of microelectromechanical (MEMS) inertial sensors. Its working principle is to use Coriolis force to detect angular velocity, that is, when the vibrating mechanical structure fixed on the substrate is subjected to external angular velocity, it will be Coriolis acceleration is generated, and the relationship between Coriolis acceleration and angular velocity and vibration linear velocity satisfies the right-hand rule, that is The Coriolis force corresponding to the Coriolis acc...

Claims

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Application Information

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IPC IPC(8): G01C19/00
CPCG01C19/00
Inventor 汪建平胡铁刚邓登峰
Owner HANGZHOU SILAN MICROELECTRONICS
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