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Wafer expanding system for semiconductor

A technology for semiconductors and wafers, applied in the field of wafer expansion systems for semiconductors, can solve the problems of inconvenience, affect the surface quality of the wafer, and cannot guarantee damage to the wafer, and achieve the effect of ensuring the quality of the expansion.

Inactive Publication Date: 2022-03-25
许霞仂
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In order to facilitate the cutting and mounting of wafers, after the wafer components leave the factory, the wafer components need to be expanded. During the process of wafer expansion, the surface of the wafer needs to be covered with a layer of blue film. It is inevitable that the blue film will be folded during the process, which will affect the surface quality of the wafer. At the same time, it is impossible to guarantee whether the wafer will be damaged when cutting the blue film. The existing wafer expansion device has a complex structure and is inconvenient to use, resulting in low expansion efficiency.

Method used

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  • Wafer expanding system for semiconductor
  • Wafer expanding system for semiconductor
  • Wafer expanding system for semiconductor

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Embodiment Construction

[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0018] refer to Figure 1-Figure 8 , the present invention provides a technical solution: a wafer expansion system for semiconductors, including a casing 10, a power chamber 20 is provided inside the casing 10, and two A pulley chamber 17, an off-axis wheel chamber 53 is provided in the lower end wall of the power chamber 20, a jacking chamber 15 is provided in the upper end surface of the pulley chamber 17, and a jacking chamber 15 is provided in the upper en...

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Abstract

The invention discloses a semiconductor wafer expanding system which comprises a machine shell, a power cavity is formed in the machine shell, two belt wheel cavities are symmetrically formed in the end faces of the left side and the right side of the power cavity, an off-axis wheel cavity is formed in the lower end wall of the power cavity, and a wafer expanding mechanism, an auxiliary mechanism and a transmission mechanism are arranged in the machine shell. The auxiliary mechanism can complete auxiliary work such as heating and blue film pasting in the wafer expansion process, the transmission mechanism can provide power for the wafer expansion mechanism and the auxiliary mechanism, and the wafer position can be adjusted through a centralizing plate which is arranged in the wafer expansion mechanism and can move horizontally. The auxiliary mechanism is provided with the placing cavity, so that the wafer is located in the middle of the placing cavity during wafer expansion, the wafer is automatically covered by the blue film and the wafer expansion quality is ensured through the unwinding wheel which is arranged in the auxiliary mechanism and can automatically rotate to discharge and roll materials, and the blue film is automatically cut through the cutting knife which is arranged in the wafer expansion mechanism and can rotate to cut the blue film.

Description

technical field [0001] The present application relates to the technical field of wafer expansion, in particular to a semiconductor wafer expansion system. Background technique [0002] In order to facilitate the cutting and mounting of wafers, after the wafer components leave the factory, the wafer components need to be expanded. During the process of wafer expansion, the surface of the wafer needs to be covered with a layer of blue film. It is inevitable that the blue film will be folded during the process, which will affect the surface quality of the wafer. At the same time, it is impossible to guarantee whether the wafer will be damaged when cutting the blue film. The existing wafer expansion device has a complex structure and is inconvenient to use, resulting in low expansion efficiency. Contents of the invention [0003] In order to solve the above problems, the present invention is achieved through the following technical solutions: [0004] A wafer expansion system...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/68H01L21/67
CPCH01L21/67126H01L21/68
Inventor 许霞仂
Owner 许霞仂