Optical lighting device and optical modification equipment

Abstract

The invention discloses an optical lighting device and optical modification equipment, the optical lighting device comprises a line light source, a light modulation component, a relay reflection component and two scanning reflectors, the light modulation component is used for modulating light emitted by the line light source into parallel light, and the parallel light is homogenized to form a light band with a set length; the relay reflection component is provided with two reflection surfaces and is used for reflecting the light band to the two scanning reflectors, and the two scanning reflectors are used for reflecting the received light rays to the working surfaces of the two processing pieces respectively; the driving part is used for driving the scanning reflecting mirror to reciprocate in the set direction, and the set direction is the direction parallel to the working face; or the scanning reflector is a spherical mirror, and the range of light reflected to the working face by the scanning reflector at least covers the working face. The structural arrangement of the optical lighting device can improve the local irradiation energy density, so that the total irradiation energy received by different areas of the target working surface is relatively more uniform, and meanwhile, the cost can be saved.

Description

Technical field [0001] The present invention relates to the field of optical modification treatment, and more particularly to an optical illumination device and an optical modification device. Background technique [0002] The film optics modification treatment of the semiconductor industry, or the film optical modification treatment of the LED and the flat plate display industry, is usually carried out by an optical modification device. [0003] Taking UV modified equipment as an example, its ultraviolet light illumination device generally uses a plan of surface light-free auxiliary lighting head to rotate, using one or two ultraviolet lamps as a light source to achieve the surface of the light source. Such surface light sources differ greatly in different regions in different regions on the target working surface, only by rotating the lighting head to reach a certain uniformity of local light intensity, that is, the overall process The total irradiation meter on the top region ...

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Problems solved by technology

[0003] Taking ultraviolet light modification equipment as an example, its ultraviolet lighting device generally adopts the scheme of surface light source to assist the rotation of the lighting head. In engineering design, one or two ultraviolet lamp tubes are used as the light source to cooperate with the optical path design to achieve the effect of surface light source. The irradiance intensity of such a surface light source on different areas of the target working surface is very different, and the time integral of the local light intensity on the working surface can only be achieved by rotating the lighting head to achieve a certain uniformity, that is, the working surface is uniform during the entire process. The total irradiance metering in the upper local area is close to uniform, and it is difficult to achieve better uniformity in practice

[0004] In practical applications, due to the uniformity adjustment of the surface light source, part of the light emitted by the ultraviolet lamp is discarded. Under normal circumstances, the effective utilization rate of light is about 40% to 50%, and the energy efficiency ratio is poor. For a 12-inch crystal In terms of round light processing, one wafer needs to be equipped with two lamps, which directly pushes up the cost

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