Shape measurement device and abnormality detection method
A measurement device and abnormality detection technology, applied in the direction of measuring devices, mechanical measuring devices, mechanical devices, etc., can solve the problem of damage to contacts, contact sensors, decreased sensitivity of contact sensors, and the inability to accurately control contact between contacts and objects to be measured Status and other issues
Pending Publication Date: 2022-05-06
MITUTOYO CORP
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Problems solved by technology
[0003] However, the sensitivity of the touch sensor may decrease due to some abnormalities in the contacts or the touch sensor.
In this case, it becomes impossible to accurately control the contact state between the contact tip and the object to be measured, and the contact tip and the object to be measured may come into contact strongly, causing damage to the contact tip and the contact sensor.
Method used
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Embodiment Construction
[0024] One embodiment of the present invention will be described with reference to the drawings.
[0025] Such as figure 1 As shown, the shape measuring device 1 of this embodiment is a three-dimensional measuring machine for measuring the shape of a workpiece W, and includes: a measuring machine body 2 for setting the workpiece W; and a control device 9 for measuring the shape of the measuring machine body 2 control, analysis of measurement results, etc.
[0026] [Structure of Measuring Machine Body 2]
[0027] Such as figure 1 As shown, the measuring machine main body 2 is provided with: a moving mechanism 4, which is arranged on a platform 3; ) to move up; and the controller 7, which is arranged inside the measuring machine main body 2, etc. (refer to figure 2 ).
[0028] A workpiece W as an object to be measured is placed on the stage 3 .
[0029] The moving mechanism 4 includes a guide 41 , a column 42 , a support 43 , a beam 44 , an X slider 45 , and a Z slider 46...
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The invention provides a shape measuring apparatus and an abnormality detection method. A shape measuring device (1) is provided with: a contact that can come into contact with a workpiece; a moving mechanism (4) that moves the contact relative to the workpiece; a movement control unit (71) that controls the movement mechanism (4); a contact sensor (6) that detects the amount of contact between the contact and the workpiece and outputs a detection signal (Sd2) corresponding to the amount of contact; and an abnormality determination unit (75) that determines an abnormality in the sensitivity of the contact sensor (6) on the basis of a change in a detection signal (Sd2) output from the contact sensor (6) during the operation of the movement mechanism (4) in which the contact is pressed against the workpiece.
Description
technical field [0001] The present invention relates to a contact type shape measuring device and an abnormality detection method for detecting abnormality of a contact sensor in the shape measuring device. Background technique [0002] Conventionally, there is known a contact-type shape measuring device that measures the shape, size, etc. of an object to be measured (for example, Document 1: Japanese Patent Application Laid-Open No. 2007-279012). Such a shape measuring device includes a contact tip capable of contacting the object to be measured and a contact sensor that detects the amount of contact between the contact tip and the object to be measured (for example, the amount of pressing, pushing in). Measure the object to be measured while controlling the contact state between the contactor and the object to be measured. [0003] However, the sensitivity of the touch sensor may decrease due to some abnormality in the contacts or the touch sensor. In this case, it becom...
Claims
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IPC IPC(8): G01B17/06
CPCG01B17/06G01B5/008G01B5/20G01B5/012
Inventor 吉谷里志宫崎智之
Owner MITUTOYO CORP