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MEMS element and vibration power generation device

A technology for components and insulating layers, applied in the field of MEMS components and vibration power generation devices, can solve the problems of damaged fixed parts, reduced strength of insulating layers, insufficient bonding strength, etc., to achieve the effect of improving productivity and suppressing the reduction of fixed strength

Pending Publication Date: 2022-05-17
SAGINOMIYA SEISAKUSHO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

When the slit is formed by etching, the fixed part fixed to the insulating layer is undercut. Therefore, for example, in a part where the width of the fixed part is narrow such as a lead part, etc., the joint strength is insufficient, and the part is lifted from the insulating layer. Impact fixed part damaged
[0004] Therefore, it is necessary to deal with the reduction in the strength of the insulating layer due to undercutting

Method used

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  • MEMS element and vibration power generation device
  • MEMS element and vibration power generation device
  • MEMS element and vibration power generation device

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other Embodiment approach

[0081] In the above-mentioned embodiment, the configuration in which the protruding portion 15 is formed on the lead portion 112 of the fixed electrode portion 11 was exemplified. However, the protruding portion 15 may also be formed on the fixed comb connection portion 111 . exist figure 1 In FIG. 1, an example of a formation site in the case where the protrusion 15 is formed in the fixed comb-tooth coupling portion 111 is shown as the formation position 15A. exist figure 1 In , the formation position 15A is shown for only one fixed electrode portion 11 , but it is of course formed in each fixed electrode portion 11 . In addition, a plurality of formation positions 15A may be provided with respect to one fixed comb-tooth coupling portion 111 . Hereinafter, the reason why the protruding portion 15 is formed in the fixed comb-tooth connection portion 111 will be described.

[0082] Fixed comb joint 111 in image 3 The area 11C extending linearly in the y direction in the s...

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Abstract

The MEMS element is provided with: a base; an insulating layer fixed on one surface of the base; a first upper layer at least partially fixed to the insulating layer; and a second upper layer provided so as to surround the periphery of the first upper layer and disposed so as to be separated from the first upper layer by a slit, the first upper layer having a protrusion protruding toward the second upper layer in a predetermined portion.

Description

technical field [0001] The invention relates to a MEMS element and a vibration power generating device. Background technique [0002] A MEMS element is known, which uses an SOI (Silicon On Insulator: silicon on insulator) substrate, and forms a fixed part with fixed comb teeth and a movable comb teeth on an insulating layer such as a silicon oxide layer formed on the silicon substrate. movable part. At least a part of each of the fixed part and the movable part is fixed to the insulating layer. A lead portion connected to the electrode terminal is formed on the fixing portion. There is also a configuration in which an outer peripheral fixing pattern is formed around a fixing portion including a lead portion. [0003] The fixed part, the movable part, and the peripheral fixed pattern are separated by narrow slits formed by etching and electrically insulated. When the slit is formed by etching, the fixed part fixed to the insulating layer is undercut. Therefore, for exampl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00B81B7/02H02N1/00
CPCB81B3/0021B81B7/02H02N1/00H02N1/08B81B2203/0136B81B2203/033B81B2203/051B81C1/00571B81C2201/0132
Inventor 芦泽久幸下村典子
Owner SAGINOMIYA SEISAKUSHO INC
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