Compensation of pupil aberration of objective lens

Abstract

The invention relates to compensation of pupil aberration of an objective lens. An objective lens system comprising an objective lens (20), the objective lens (20) comprising a set of optical elements, the optical properties of which cause an optical aberration of the objective lens, the optical aberration includes at least an image aberration causing an aberration of an edge ray of the light beam with respect to a chief ray of the light beam and a pupil aberration causing a lateral offset of a first intersection point along an optical axis of the objective lens (20) with respect to a second intersection point, the first intersection point being defined by an intersection point of the optical axis with a first chief ray having a first angle of incidence. The second intersection is defined by an intersection of the optical axis and a second chief ray having a second angle of incidence, the first angle of incidence being different from the second angle of incidence. The system comprises an optical compensation element (25) configured to manipulate a propagation path of light passing through the optical compensation element (25), where the optical compensation element (25) is configured and arranged relative to the objective lens (20) such that a lateral offset caused by pupil aberration is reduced.

Description

technical field [0001] The present invention relates to the compensation of pupil aberrations caused by objective lenses used for measurement purposes and related methods. Background technique [0002] It is common practice to inspect the workpiece after production, eg, on a coordinate positioning device such as a coordinate measuring machine (CMM), to check the correctness of predetermined object parameters, such as the size and shape of the object. Furthermore, the detection of surfaces of unknown objects is of interest in many industrial applications. Such measurements may also typically be provided using a coordinate measuring machine or any other suitable type of scanning device. [0003] In a conventional 3D coordinate measuring machine, the probe is supported for movement along three mutually perpendicular axes (in the X, Y and Z directions). Thereby, the probe can be guided to any point in the space of the measurement volume of the coordinate measuring machine, and...

AI Technical Summary

Problems solved by technology

Furthermore, due to the nature of the applied scheme, there is no epipolar geometry that allows efficient stereo matching

Therefore, complex algorithms for stereo matching become more time-consuming

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