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Processing device

A technology for processing devices and processing tanks, applied in metal processing, metal processing equipment, manufacturing tools, etc., can solve problems such as error recovery

Pending Publication Date: 2022-06-07
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, at the production site, there are cases where an operator manages a plurality of processing devices, and it may not be possible to perform an operation to recover from an error immediately in order to restart the processing operation.
Therefore, the processing device can only stand by while the processing is stopped, and there is room for improvement in the utilization of the standby time.

Method used

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Embodiment Construction

[0027] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include contents that can be easily conceived by those skilled in the art and substantially the same contents. In addition, the structures described below can be appropriately combined. In addition, various omissions, substitutions, or changes of the configuration can be made without departing from the gist of the present invention.

[0028] The processing apparatus which concerns on embodiment of this invention is demonstrated based on drawing. figure 1 It is a perspective view which shows the structural example of the processing apparatus which concerns on embodiment. figure 2 is shown schematically in partial section figure 1 Side view of the cutting unit and the structure holding the table of the...

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Abstract

The invention provides a processing device which can effectively utilize the stopping time of the processing device. The control unit of the machining apparatus includes: an abnormality detection unit that detects an abnormality of the machining apparatus; a machining stopping part for stopping the cutting machining of the cutting unit when the abnormality is detected; and a data collection unit that collects data relating to the processing device during a standby time from the stop of the processing until the operator performs an operation to restore the abnormality.

Description

technical field [0001] The present invention relates to a processing apparatus for processing a workpiece. Background technique [0002] In order to divide a wafer such as a semiconductor wafer into individual device chips, processing apparatuses such as various cutting apparatuses have been conventionally used (for example, refer to Patent Document 1). [0003] Patent Document 1: Japanese Patent Laid-Open No. 2008-4807 [0004] In the processing apparatuses described in Patent Document 1 and the like, there is a design in which an alarm is issued to notify the operator when an error that requires the operator to perform work occurs. However, in a production site, there are cases where an operator manages a plurality of processing apparatuses, and sometimes it is not possible to perform an error recovery operation in order to restart the processing operation immediately. Therefore, the processing apparatus can only stand by in a state where processing is stopped, and there...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/78H01L21/67
CPCH01L21/78H01L21/67253H01L21/67288B26D5/007B26D1/185H01L21/67092H01L21/67742H01L22/12B24B27/0616G06T2207/30148G06T7/0004
Inventor 大森崇史
Owner DISCO CORP
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