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Processing method adopting lens group

A processing method and lens group technology, which can be applied in the direction of photolithography process exposure device, microlithography exposure equipment, etc., can solve the problems of increased production cost, tedious adjustment and correction process, low flexibility, etc.

Pending Publication Date: 2022-07-12
源能智创(江苏)半导体有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The high requirements for lens magnification will virtually increase the production cost
At the same time, in the process of use, if the magnification of each lens is inconsistent, it needs a cumbersome adjustment and correction process, and even needs to disassemble the lens to achieve it. The flexibility is low, the operation is cumbersome, and the time cost and labor cost are increased.

Method used

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  • Processing method adopting lens group
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  • Processing method adopting lens group

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Embodiment Construction

[0026] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0027] figure 1 A lens group is shown, and the lens group contains multiple lenses. The number of lenses in the lens group is not limited. It can be set as required. When the lens is projected, it is expected that the magnification of each lens is consistent, so that the The same strip width is convenient for matching with the moving device of the carrier 2, and it is beneficial for the strips between adjacent lenses to be well spliced. The following is a detailed description of the processing method when the lens magnifications in the lens group are inconsistent.

[0028] Now, the lens group includes four lenses as an example for description, namely the first lens 11, the second lens 12, the third lens 13 and the fourth lens 14. Each lens in the lens group includes ...

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Abstract

The invention provides a processing method adopting a lens group, and the method comprises the steps: obtaining the minimum lens magnification according to the magnification of each lens in the lens group; the width of a projection strip is obtained with the minimum lens magnification; obtaining a projection graph of each strip according to the width of the projection strip; and configuring each pixel of the spatial light modulation element according to each strip projection pattern and the corresponding lens magnification. The problems that when the lens magnifications are inconsistent, pattern splicing is prone to deviation and poor in effect are effectively solved, and complex debugging of the lens magnifications is avoided.

Description

technical field [0001] The invention relates to a processing method using a lens group, in particular to a processing method with different lens magnifications in the lens group. Background technique [0002] In the semiconductor and PCB industries, the light emitted by the light source can be used to realize various processing procedures such as exposure of substrate circuit patterns, exposure of solder mask ink, punching, and etching. The lens is a commonly used optical element, which performs optical processing on the light emitted by the light source, and enlarges or reduces the light spot projected by the light source through different lens magnifications. [0003] In the exposure process, multiple lenses are usually used to expose the substrate at the same time, which reduces the number of movements of the substrate or the lens and effectively improves the exposure efficiency. However, when multiple lenses are used for exposure, the lens magnification of each lens nee...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70258G03F7/70591G03F7/70625G03F7/7085
Inventor 胡传武徐国栋李伟成张雷
Owner 源能智创(江苏)半导体有限公司
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