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Non linear deviation compensation device used for interference measuring element

A nonlinear error and interferometric measurement technology, applied in the field of optical measurement, can solve the problems of nonlinear error, nonlinear functional relationship, measurement accuracy and application range limitation, etc., to achieve the effect of simple implementation, simple system implementation, and expansion of the application field.

Inactive Publication Date: 2005-01-19
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

[0003] In order to reduce the complexity of the system, the traditional application method approximates the relative displacement Δy of the stylus as a linear function of the optical path difference ΔS within the working range of ±5°. However, the functional relationship between Δy and ΔS is nonlinear in nature. Yes, doing linear approximation will inevitably bring nonlinear error
It is the existence of this nonlinear error that greatly limits its measurement accuracy and application range.

Method used

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  • Non linear deviation compensation device used for interference measuring element
  • Non linear deviation compensation device used for interference measuring element
  • Non linear deviation compensation device used for interference measuring element

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Embodiment Construction

[0011] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0012] The size of each structural unit adopts the attached figure 2 When the symbols shown are expressed, the functional relationship between the optical path difference and displacement and the angle θ between the lever and the horizontal direction and the relationship between the two can be obtained as follows:

[0013] dS dθ = - 2 [ ( - ( l 2 + 6 3 a ) sin ( θ ) + 1 3 a cos ( ...

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Abstract

A non-linear error compensator for interference measuring unit features that two same photoelectric diodes are symmetrically arranged relatively to lever, the slit and light source are in the same plane as the lever and symmetrical to the lever, the counter for light path difference is connected between photoelectric receiver and data processor, and the absolute zero signal generator is connected between the photoelectric diode and data processor. Its advantages are high effect (increasing precision from 2% to 0.1%), simple structure and low cost.

Description

technical field [0001] The invention belongs to the technical field of optical measurement, and specifically relates to a nonlinear error compensation device for an interferometric measurement unit. figure 1 The theoretical error of the nonlinear system of the shown interference unit is compensated, and the measurement accuracy can be increased from the original 2% to 0.1%. Background technique [0002] attached figure 1 The shown interferometric unit with the corner cube as the core device can produce interference fringes ([1] Interferometric Test Technology, Wang Wensheng, Weapons Industry Press, 1992, 4. [2] Laser measurement technology, edited by Sun Changku and Ye Shenghua, Tianjin University Press, 2001, 7.) and is widely used in precision geometric quantity (displacement, angle) measuring instruments ([3] British Taylor Hobson company, Talysurf2, Talysurf5 type surface profile Instrument. [4] American Brown-Boveri company laser interferometer.). [0003] In order t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02G01B11/02
Inventor 郭军谢铁邦
Owner HUAZHONG UNIV OF SCI & TECH
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