Automatic disassembling scrubbing apparatus for treating discharge gas

A technology of exhaust gas and automatic disassembly, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, combustion methods, etc., can solve inconvenience and other problems, achieve the effects of extended service life, convenient maintenance and management, and simple cleaning operations

Inactive Publication Date: 2005-12-14
KOREA M A T
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional scrubbers are all simply assembled equipment, so they must be disassembled and cleaned one by one, which is very inconvenient

Method used

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  • Automatic disassembling scrubbing apparatus for treating discharge gas
  • Automatic disassembling scrubbing apparatus for treating discharge gas
  • Automatic disassembling scrubbing apparatus for treating discharge gas

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0013] exist figure 2 Among them, the gas scrubber of the present invention is also made up of inlet 11, combustion chamber 13, wet processing chamber 15, discharge port (not shown in the figure) and the casing that accommodates combustion chamber 13 and wet processing chamber 15, etc. Wherein, the discharged gas will flow into the inflow port 11; the combustion chamber 13 is connected to one end of the inflow port 11, and the exhaust gas flowing in is combusted; the wet process chamber 15 is connected to the lower end of the combustion chamber 13, and it will clean Water-soluble harmful substances in the exhaust gas that has been combusted through the combustion chamber 13; the discharge port is connected to one end of the wet processing chamber 15, and it will discharge the treated exhaust gas to the outside.

[0014] This scrubbing device is specially provided with horizontally moving guide mechanisms 17a and 17b at the lower ends of both sides of the wet processing chambe...

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PUM

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Abstract

The invention discloses an automatically disassembled gas scrubber for treating exhaust gas. A moving guide mechanism is arranged on the side of the wet process chamber, and the wet process chamber can be pushed out of the box along the guide mechanism; the combustion chamber passes through a pivot The hinge is connected to the wet processing chamber, and there is a rotating shaft on its side, which is pushed out of the box through the wet processing chamber along the moving guide mechanism, which can make the combustion chamber rotate 90 degrees; on the back of the wet processing chamber There is a screw at the lower end, and a motor at the lower end of the box to drive the rotating screw. The horizontal movement of the wet treatment chamber can be controlled by the driving of the motor, which makes the cleaning operation of the scrubber very convenient.

Description

technical field [0001] The present invention relates to a scrubbing device for treating exhaust gas, and in more detail, it relates to a scrubbing device for treating exhaust gas with the function of automatic disassembly. Background technique [0002] Usually, the exhaust gas generated in the process of manufacturing semiconductors contains high concentrations of toxic substances, so the toxic substances must be removed before the exhaust gas is released into the atmosphere. exist figure 1 A scrubber for removing toxic substances from exhaust gases is shown in . As shown in the figure, it consists of the following parts: an inflow port 1 for inflowing exhaust gas; a combustion chamber 3 for burning and treating the inflowing exhaust gas; a wet processing chamber 5 connected to the lower end of the above-mentioned combustion chamber, It is used to remove the water-soluble harmful substances contained in the exhaust gas treated by the combustion chamber 3; the exhaust port ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D53/34B01D53/18B01D53/77H01L21/00
CPCB01D53/18H01L21/00
Inventor 金东秀
Owner KOREA M A T
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