Semiconductor laser device
A technology of laser devices and semiconductors, applied in the direction of semiconductor lasers, laser components, lasers, etc., can solve the problem that semiconductor lasers have not been put into practice
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no. 1 example
[0050] figure 1 is a diagram showing the layer structure of the semiconductor laser device in the first embodiment of the present invention viewed from the end face side. exist figure 1 neutralize Figure 7 The same or similar components shown in the Figure 7 The same reference numerals indicate.
[0051] figure 2 is a detailed view showing the multiple quantum well active layer 3 of the semiconductor laser device in the first embodiment. exist figure 2 In , the vertical axis represents the Eg of the crystals constituting each layer, and the horizontal axis represents the distance from the substrate.
[0052] The multiple quantum well active layer 3 has two quantum well layers 3a and barrier layers 3b provided on both sides of each quantum well layer 3a. The quantum well layer 3a is made of In 1-V1 Ga V1 As 1-W1 P W1 Formed, the barrier layer 3b is made of In 1-V2 Ga V2 As 1-W2 P W2 constitute. Here, V1 and V2 satisfy V1
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no. 2 example
[0083] Figure 4 is a diagram showing the crystal layer structure of the semiconductor laser device in the second embodiment of the present invention viewed from the end face side. exist Figure 4 , with the first embodiment figure 1 The same components shown in the figure 1 The same reference numerals indicate.
[0084] exist Figure 4 , shows n-type GaAs substrate 1, n-type Al 0.45 Ga 0.55 As first capping layer 2 (thickness 3.0 μm), multiple quantum well active layer 23 (emission wavelength 0.78 μm), P-type Al 0.49 Ga 0.51 As second cap layer 4 (thickness 0.1967μm), p-type GaAs etch stop layer 5 (thickness 3nm), p-type Al 0.49 Ga 0.51 As third capping layer 26 (thickness 1.28 μm), n-type Al 0.7 Ga 0.3 As current blocking layer 27 (thickness 0.7 μm), and p-type GaAs contact layer 28 (thickness 2.0 μm). The current blocking layer 27 has a strip-shaped opening portion, which mainly forms a current confinement structure in which current can only flow directly under ...
no. 3 example
[0090] 5(a) is a view showing the crystal layer structure of the semiconductor laser device in the third embodiment of the present invention viewed from the end face side, and FIG. 5(b) is a cross-sectional view along line b-b of FIG. 5(a). In Figures 5(a) and 5(b) with the first embodiment figure 1 The same components shown in the figure 1 The same reference numerals indicate.
[0091] In Fig. 5(a), an n-type GaAs substrate 1, n-type Al 0.43 Ga 0.57 As first capping layer 2 (thickness 3.0 μm), multiple quantum well active layer 33 (emission wavelength 0.78 μm), P-type Al 0.6 Ga 0.4 As second cap layer 4 (thickness 0.1967 μm), p-type GaAs etch stop layer 5 (thickness 3nm), and p-type Al 0.49 Ga 0.51 As third capping layer 6 (thickness 1.28 μm). The third cover layer 6 has a raised strip structure. The third cover layer 6 has a height of approximately 2.5 μm and a maximum width of approximately 4.0 μm. In particular, the portion of the third cap layer 6 in contact wi...
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