Apparatus and method for removing thin film

Abstract

Provided is a device and a method for removing a film for removing a firm coated on a plate member. A glass substrate on which a film is coated is moved to a removal position by moving means, and compressed air is ejected at a leading end in the moving direction of the glass substrate at the removal position of the moving means to peel the film from the substrate. The removed film peeled from the substrate is delivered from the removal position of the transfer means by vacuum suction by a vacuum suction rolling means and the film waste delivered by the vacuum suction rolling means is inhaled and collected by a collecting means, then the film waste discharged from the collecting means is compressed and disposed.

Description

technical field [0001] The present invention relates to a thin film removal device and a thin film removal method, for example, to a thin film removal device and a thin film removal device capable of efficiently performing a series of processes such as peeling, collection, and volume reduction (or compression) for removing a thin film on a glass substrate method. Background technique [0002] As we all know, the glass substrate used in the manufacture of flat displays (Flat Display) such as TFT-LCD (Thin Film Transistor Driven Color Liquid Crystal Display), PDP (Plasma Display Panel), EL (Electroluminescence Electroluminescence) is, will The water glass (sodium silicate) melted in the glass melting furnace is supplied to the melt shaper, and after being made into a glass substrate, it is cut according to the original standard, and after the surface is coated with a protective film, it is transported to the glass substrate processing line. In the glass substrate processing l...

AI Technical Summary

Problems solved by technology

[0006] However, if foreign matter such as dust adheres to the surface of the above-mentioned urethane roller, the adhesive force of the urethane roller will be reduced and its function will be lost.

Therefore, it is necessary to periodically stop the operation of the film removal device and periodically clean the surface of the urethane roller, which has the problem of greatly reducing productivity.

In particular, in order to regenerate the adhesive force of the urethane roller, it is necessary to use a solvent such as methyl ethyl ketone, which is harmful to the human body, for cleaning, so there is also a disadvantage of damaging the working environment

Moreover, the waste film peeled off from the glass substrate by the urethane roller needs to be collected and discarded by the operator, which is labor-intensive and time-consuming. It takes a lot of time and effort to discard the waste film by reducing the volume of the waste film. The problem of production costs

Generally, in order to collect the waste film efficiently, the operator carries out the collection operation about once an hour. When the operator does not collect the waste film and puts it on the processing line as it is, the waste film is scattered on the processing line. surroundings, not only damage the working environment, but also enter the processing line equipment and cause accidents

[0007] In addition, the technology of the above-mentioned Patent Document 1 still has many problems in the continuous supply of the adhesive tape.

Even in this technology, the operator must manually remove the film attached to the adhesive tape of the pressure roller. Since the waste film needs to be taken away, compressed or volume reduced, not only the production efficiency is reduced, but also there is an increase. The problem of production costs

Images