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Method for improving excitatory performance of micromechanical resonance pressure sensor with single beam

A pressure sensor and single-beam structure technology, which is applied in the measurement of the property and force of piezoelectric resistance materials, resistors, semiconductor devices, etc., can solve problems such as excitation and excitation stability, poor reliability, and difficulty in exciting resonant beams

Inactive Publication Date: 2007-03-14
NO 24 RES INST OF CETC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the excitation resistors are polysilicon resistors and boron diffusion resistors, which are not easy to excite the resonant beams, such as: "Journal of Electronics and Information" (Vol. The article "Research on Thermally Excited Silicon Beam Resonators" on page 791 records a method of using platinum thin film resistors as excitation resistors, but these methods have not solved the poor stability and reliability of excitation and excitation under low power consumption. The problem

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  • Method for improving excitatory performance of micromechanical resonance pressure sensor with single beam
  • Method for improving excitatory performance of micromechanical resonance pressure sensor with single beam
  • Method for improving excitatory performance of micromechanical resonance pressure sensor with single beam

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Embodiment Construction

[0015] Specific embodiments of the present invention are not limited to the following description. The present invention will be further described below.

[0016] The method of the invention is to manufacture an excitation resistor 2 on the surface of the resonant beam 6 of the single-beam structure micromechanical resonant pressure sensor, and the excitation resistor 2 is made of platinum thin film resistor. Platinum thin film resistor 2 described in this example is horseshoe shape, thickness 120-300 angstroms, preferred thickness is 150-250 angstroms, best thickness is 180 angstroms, resistance bar width is 20 microns, total length is 440 microns, square resistance is 6-20 ohms / square, the best square resistance is 10-16 ohms / square, the best square resistance is 14 ohms / square, the total resistance is 132-440 ohms, the best total resistance is 220-352 ohms, the best The total resistance is 208 ohms. The purity of the platinum material for making the platinum thin film res...

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Abstract

A method for increasing excitation performance of micromechanical resonant pressure transducer with single beam structure is to use Pt film resistance prepared by Pt as the exciting resistance on resonant beam surface of the transducer. The method can raise reliability and stability of resonant single beam excitation for resonant pressure transducer.

Description

(1) Technical field [0001] The invention relates to a method for improving the excitation performance of a micro-machine resonance pressure sensor, in particular to a method for improving the excitation performance of a single-beam structure micro-machine resonance pressure sensor. (2) Background technology [0002] At present, there are many types of micro-mechanical resonant pressure sensors. In terms of excitation methods, there are electrostatic excitation, electromagnetic excitation, thermal excitation, etc. In terms of structure, there are butterfly structure and single beam structure. Fig. 1 describes an existing heat-excited resonant pressure sensor with a single-beam structure, which is made on a silicon-based substrate 4 with a layer of silicon thin film 3, and a pick-up resistor is made on the resonant beam formed by the silicon thin film 3 1 and an excitation resistor 2 for exciting the sensor resonant beam. At present, the excitation resistors adopt polysilicon...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/18H01C7/00H01L29/84
Inventor 张正元徐世六刘玉奎杨国渝税国华
Owner NO 24 RES INST OF CETC