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Method for improving excitatory performance of micromechanical resonance pressure sensor with single beam

A pressure sensor and single-beam structure technology, which is applied to the measurement of the property and force of piezoelectric resistance materials, resistors, semiconductor devices, etc., can solve the problems of excitation stability, poor reliability, and difficulty in exciting resonant beams, etc.

Inactive Publication Date: 2005-07-27
NO 24 RES INST OF CETC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, the excitation resistors are made of polysilicon resistors and boron diffusion resistors, which are not easy to excite the resonant beams, and the excitation stability and reliability are poor.

Method used

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  • Method for improving excitatory performance of micromechanical resonance pressure sensor with single beam
  • Method for improving excitatory performance of micromechanical resonance pressure sensor with single beam
  • Method for improving excitatory performance of micromechanical resonance pressure sensor with single beam

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Embodiment Construction

[0015] Specific embodiments of the present invention are not limited to the following description. The present invention will be further described below.

[0016] The method of the invention is to manufacture an excitation resistor 2 on the surface of the resonant beam 6 of the single-beam structure micromechanical resonant pressure sensor, and the excitation resistor 2 is made of platinum thin film resistor. Platinum thin film resistor 2 described in this example is horseshoe shape, thickness 120-300 angstroms, preferred thickness is 150-250 angstroms, best thickness is 180 angstroms, resistance bar width is 20 microns, total length is 440 microns, square resistance is 6-20 ohms / square, the best square resistance is 10-16 ohms / square, the best square resistance is 14 ohms / square, the total resistance is 132-440 ohms, the best total resistance is 220-352 ohms, the best The total resistance is 208 ohms. The purity of the platinum material for making the platinum thin film res...

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PUM

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Abstract

A method for increasing excitation performance of micromechanical resonant pressure transducer with single beam structure is to use Pt film resistance prepared by Pt as the exciting resistance on resonant beam surface of the transducer. The method can raise reliability and stability of resonant single beam excitation for resonant pressure transducer.

Description

(1) Technical field [0001] The invention relates to a method for improving the excitation performance of a micro-machine resonance pressure sensor, in particular to a method for improving the excitation performance of a single-beam structure micro-machine resonance pressure sensor. (2) Background technology [0002] At present, there are many types of micro-mechanical resonant pressure sensors. In terms of excitation methods, there are electrostatic excitation, electromagnetic excitation, thermal excitation, etc. In terms of structure, there are butterfly structure and single beam structure. figure 1 describes an existing thermally excited resonant pressure sensor with a single-beam structure, which is made on a silicon-based substrate 4 with a layer of silicon film 3, and a pick-up resistor 1 and An excitation resistor 2 for exciting the resonant beam of the sensor. At present, the excitation resistors are made of polysilicon resistors and boron diffusion resistors, which ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18H01C7/00H01L29/84
Inventor 张正元徐世六刘玉奎杨国渝税国华
Owner NO 24 RES INST OF CETC