Semitone mask coding method for producing microoptical element

A technology of halftone mask and coding method, which is applied to optical components, optics, opto-mechanical equipment, etc., can solve the problems of complex design, difficult to guarantee the surface and axis symmetry of components, and large amount of coded data, and achieves coded data volume. reduced effect

Inactive Publication Date: 2004-12-08
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

At present, the gray-scale coding method is generally used. The amount of coding data of this coding method is often large, especially for masks with a large number of micro-component arrays, so the design is more complicated. In addition, the axis of the processed component surface shape Symmetry properties are also difficult to guarantee

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  • Semitone mask coding method for producing microoptical element
  • Semitone mask coding method for producing microoptical element
  • Semitone mask coding method for producing microoptical element

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Embodiment Construction

[0032] Such as figure 1 , figure 2 Shown, the encoding process of the present invention is: first to axisymmetric element surface shape function f (r) ( figure 1 with figure 2 shown) to get its spatial spectrum distribution function g(ρ) by Bessel-Fourier transform, from which the highest cut-off frequency B(ρ) of the surface shape function can be determined image 3 shown);

[0033] g ( ρ ) = 2 π ∫ 0 ∞ f s ( r ) r J 0 ( 2 πrρ ) dr - - - ( 1 )

[0034] Then according to the root λ of the zero-order Bessel function i (i=1, 2,...) and the ratio of the highest cu...

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Abstract

In the method, Bessel-Fourier transform is carried out to axial symmetrical element surface function for obtaining its space spectrum distribution function 9 and to use it to confirm the highest cut-off frequency B of surface function, position of sampling code to surface function is confirmed according to specific value of zero-order Bessel function root lambda=(i=1,2...) to the highest cut-off frequency B, at least zone code is obtained according to surface function at each code position as transmissivity at each zone internal mask is set as value of one and transmissivity at the other position is set as value of zero.

Description

technical field [0001] The invention relates to a halftone mask coding method for making continuous surface axisymmetric micro-optical elements. Background technique [0002] Micro-optical components are a new type of optical device, which are widely used in aerospace, optical interconnection, optical communication and other fields. Compared with binary micro-optical elements, continuous surface micro-optical elements have the advantages of high energy utilization rate and good optical performance, and the research on its fabrication method has been paid much attention. [0003] The existing main methods for making continuous surface micro-optical elements are gray-scale masking method, mask shifting method and half-tone masking method. A more accurate continuous surface shape of the control element can be obtained by using the gray-scale mask method, but the high price of the mask material limits its wide application. The mask moving method is only suitable for making one...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B3/00G03F7/00G06F17/14
Inventor 王长涛杜春雷
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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