Visual display element in micro electromechanical unit
An optical display, micro-electromechanical technology, applied in optical components, optics, opto-mechanical equipment, etc., can solve the problems of difficulty in improving the reliability of micro-electro-mechanical optical display components and fracture of mechanical strength of the top 162
Active Publication Date: 2005-08-31
AU OPTRONICS CORP
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However, if Figure 2B As shown, because of the plug hole 152, when the deposition thickness of the top 162 is lower than a predetermined thickness, the center of the top 162 will be obviously concave, so that the connection thickness g between the top 162 and the central columnar region of the support column 16 becomes thinner, As a result, the top 162 is easily broken due to insufficient mechanical strength, which makes it difficult to improve the reliability of existing MEMS optical display elements
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[0043] image 3 It is a partial cross-sectional view of the support column of the microelectromechanical optical display element of the present invention. The surface of the glass substrate 22 of the MEMS optical display element has a conductive layer 23 and a dielectric layer 24. The reflective layer 28 is supported by a plurality of supporting columns 26 (only one supporting column 26 is represented in the figure), and the reflective layers 28 are separated by a predetermined distance. In the manner of the distance d, the supporting column 26 is suspended on one side of the support column 26 relative to the dielectric layer 24 .
[0044] like image 3 As shown, the side surface of the support column 26 and the dielectric layer 24 form an acute angle θ, so that the support column 26 has an inverted truncated cone-shaped structure that is wide at the top and narrow at the bottom. The top portion 262 can increase the adhesion strength of the support column 26 to the suspended...
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Abstract
The present invention relates to a microelectromechanical optical display element. It includes a conducting layer, a dielectric layer, a reflecting layer and several supporting columns, the supporting columns are placed between dielectric layer and reflecting layer, in which every supporting column is made nito the form of inverted frustum, and the side surface of the supporting column makes an acute angle with dielectric layer, and said supporting column has a horizontal extended top portion so as to make the reflecting layer be suspended and placed on one side of supporting column relatively to dielectric layer, and between the reflecting layer and dielectric layer a defined space distance is formed.
Description
technical field [0001] The invention relates to a microelectromechanical optical display element, in particular to a support structure of the microelectromechanical optical display element. Background technique [0002] US Patent Publication Nos. 6,574,033 and 6,794,119 respectively disclose a new type of microelectro-optical optical display device (MEMO), which achieves the purpose of image display through a suspended reflective structure and the interference principle. [0003] Figure 1A It is a schematic diagram of the structure of the existing MEMS optical display element. The surface of the glass substrate 12 of the MEMS optical display element 10 has a conductive layer 13 and a dielectric layer 14, and the reflective layer 18 is supported by a plurality of supporting columns 16, and a Spacing d 1 Suspended on the dielectric layer 14 . The support column 16 is formed by deposition of a polymer material, and has a laterally extending top 162 at the top of the support ...
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IPC IPC(8): G02B26/00G03F7/00
Inventor 李嘉盛林汉涂翁嘉璠
Owner AU OPTRONICS CORP