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Substrate detector

A detection device and substrate technology, which can be used in measurement devices, preparation of test samples, material analysis by optical means, etc., and can solve problems such as difficult zero-angle detection

Inactive Publication Date: 2006-03-29
优视株式会社
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0016] Moreover, when performing zero-angle detection while changing the illumination angle of the surface lighting system, the reflection angle and brightness of light will vary with the illumination angle, which makes it difficult to perform zero-angle detection correctly

Method used

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Examples

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no. 1 example

[0055] Figure 7 The structure of the substrate inspection apparatus according to the first embodiment of the present invention is shown.

[0056] Such as Figure 7 As shown, the substrate inspection apparatus 100 according to this embodiment includes: a surface illumination system 110 ; a spread illumination system 120 ; and a substrate positioning system 130 . Similar to the description of the structure and function of each element of the conventional substrate inspection apparatus 1 , the description of the structure and function of each element of the substrate inspection apparatus 100 according to this embodiment will be omitted hereinafter. The following description will focus on the characteristic parts of this embodiment.

[0057] In the same manner as the conventional substrate inspection apparatus 10 , the surface illumination system 110 according to the present embodiment includes: a light source 111 , a reflector 112 , a light concentrator 113 and a light diffuse...

no. 2 example

[0072] Figure 14 is a perspective view showing a substrate inspection device according to a second embodiment of the present invention. Figure 15 is a longitudinal sectional view showing a substrate inspection device according to a second embodiment of the present invention.

[0073] Such as Figure 14 As shown, the substrate inspection apparatus 200 according to this embodiment includes: a surface illumination system 210 ; a substrate positioning system 220 ; and a spread illumination system 230 .

[0074] The surface illumination system 210 is used to illuminate the surface of the substrate S for visual inspection of the substrate surface. In the same manner as in the prior art, the surface lighting system 210 includes: a light source 211 , a reflector 212 , a concentrator 213 and a diffuser 214 . The structures and functions of the above-mentioned light source, reflector, light concentrator and light reflector are the same as those of the prior art, so no further descr...

no. 3 example

[0086] Figure 17 is a front view showing a substrate inspection apparatus according to a third embodiment of the present invention. Figure 18 is a plan view of a substrate inspection device according to a third embodiment of the present invention. Figure 19 is a view showing the pivotal movement of the surface lighting system according to the third embodiment of the present invention.

[0087] Such as Figure 17 and Figure 18 As shown, the substrate inspection apparatus 300 according to this embodiment includes: a surface illumination system 310 ; a substrate positioning system 320 ; and a spreading illumination system 330 .

[0088] Consider first the surface illumination system 310, which is used to illuminate the substrate surface for visual inspection of the substrate surface. In the same manner as in the prior art, each surface lighting system 310 of this embodiment includes: a light source 311 , a reflector 312 , a concentrator 313 and a diffuser 314 . The struc...

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Abstract

The present invention discloses a substrate detector to detect the defects of the LCD substrate surface. The substrate detector can detect the whole large size substrate and the substrate fixed station can change the position of the substrate which makes the height and site area of the substrate detector minimize.

Description

technical field [0001] The invention relates to a substrate detection device for detecting defects on the surface of an LCD substrate. Background technique [0002] In general, during the manufacture of large-sized substrates such as semiconductor wafers, LCDs, PDPs, and ELs, the substrates must be visually inspected to find out surface defects such as impurities, stains, etc., that appear on the substrates. In order to facilitate defect detection, substrate inspection devices are generally configured to uniformly illuminate the entire substrate to inspect the entire substrate. [0003] refer to figure 1 , the structure of a conventional substrate inspection device is shown schematically. Such as figure 1 As shown, the conventional substrate inspection apparatus includes a surface illumination system 10 , a spread illumination system 20 and a substrate positioning system 30 . [0004] The surface illumination system 10 is located above the substrate positioning system 30...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/956G01N1/28
CPCG01N21/8803G01N21/8806G01N2021/8809G01N2021/8835G01N2021/9513
Inventor 李荣钟崔浚泳朴将完金玟洙葛钟勋崔相镇曺载铉
Owner 优视株式会社