Inspection method and inspection apparatus
An inspection method and measurement technology, applied in the field of inspection, can solve the problems of inability to provide inspection devices and the like
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[0089] In addition, in this embodiment, the MTS (Maharanobis-Taguchi System) method is used as a parameter-based method. That is, in the MTS method, an ordinary set is set in any meaning, such as a set of good products. Call it unit space. In the judgment of defective products, good products are included in the unit space. Furthermore, if the unit space and observation variables are set, the mean vector and the variance-covariance matrix which are the basis of the Maharanobis distance described below are estimated from only the samples belonging to the unit space.
[0090] Here, the Maharanobis distance is represented by the following formula, and is a scalar value representing a distance taking the mean vector as the origin and taking into account the correlation degree of the variables which is the variance covariance matrix.
[0091] Δ 2 =(x-μ)'Σ -1 (x-μ) (Equation 1)
[0092] (Σ: variance covariance matrix, μ: mean vector)
[0093] In this way, the Maharanobis distan...
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