Instrument for detecting flatness of round CD master-disc glass substrate

A technology of flatness detection and glass substrate, which is applied in the field of detectors, can solve the problems of affecting production efficiency, non-detection of rough surface, inconvenient use in large-scale production, etc., and achieve the effects of improved measurement accuracy, high work efficiency and convenient operation

Inactive Publication Date: 2006-10-25
上海申菲激光光学系统有限公司
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Problems solved by technology

[0003] In previous flatness inspection tests, the "laser plane interferometer" (such as the PG15-J4 laser plane interferometer manufactured by the Institute of Optics and Mechanics of the Chinese Academy of Sciences) was often used to measure the aperture. It is inconvenient to use in production and affects production efficiency; especially

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  • Instrument for detecting flatness of round CD master-disc glass substrate
  • Instrument for detecting flatness of round CD master-disc glass substrate
  • Instrument for detecting flatness of round CD master-disc glass substrate

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[0011] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments:

[0012] Depend on figure 1 , figure 2 , image 3 It can be seen that the present invention includes: a triangular work surface 3, three circular seats 1 are respectively arranged on the triangular work surface 3, and a small rotatable steel ball 11 is arranged on each circular seat 1; A group of small ball bearings and fixed bases 2 are evenly distributed on the edge triangular positions of the work table 3; a dial indicator 4 is placed under the central position hole of the triangular work table 3;

[0013] The said round seat 1 can be adjusted in stages, and its corresponding small ball bearing and even the fixed seat 2 can also be adjusted in stages; the said stage can be 2 or 3 or 4;

[0014] There is a triangular work surface above the base of the present invention, and the scientific principle of determining a plane is made o...

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Abstract

The invention relates to a rotundity disc mother disc glass basal sheet flatness detector that includes a triangle work top, three rotundity bases, each of which installs a ball. The brim triangle location of the work top has a set of small ball bearing fixing base, and the center of the work top has a dial gauge. It sharply improves the measuring accuracy, and it is easy to operate and has high working efficiency.

Description

technical field [0001] The invention relates to a detector, in particular to a flatness detector of a glass substrate of a circular optical disc master disk. Background technique [0002] With the rapid development of the global optical disc storage, optoelectronics, and microelectronics industries, laser disc master substrates, integrated circuit mask substrates, and various circular ultra-high-quality surface optical substrates are increasingly used in this field. . In the production process of these optical disc master substrates with ultra-high-quality surface requirements, various dimensional errors of these products need to be comprehensively inspected. The quality index of "flatness of glass substrate of optical disc master" is very important to the application of the product, which directly affects the use effect of mass production in the optical disc industry. [0003] In the past flatness inspection tests, the "laser plane interferometer" (such as the PG15-J4 las...

Claims

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Application Information

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IPC IPC(8): G01B5/28G01B3/22
Inventor 应永伟
Owner 上海申菲激光光学系统有限公司
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