Method for detecting 3d measurement data using allowable error zone

Abstract

A method of detecting 3D measurement data using an allowable error zone is provided. The method detects 3D measurement data that corresponds to a preset measurement allowable error zone for each basic diagram when detecting 3D measurement data. For that purpose, a control unit generates auxiliary geometry data from a design data storage unit on the basis of analysis information of the design data; sets an allowable error zone for measurement in the auxiliary geometry data on the basis of allowable error information inputted from a user interface; controls a coordinate system of measurement data to coincide with a coordinate system of design data of the object; extracts candidate point groups included in the allowable error zone for measurement of the auxiliary geometry data from the measurement data; and fits the candidate point groups extracted from the candidate point groups included in the allowable error zone for measurement to output the fitted candidate point groups to the user interface.

Description

technical field [0001] The present invention relates to a method for automatically detecting three-dimensional (3D) measurement data, and in particular to a method for detecting 3D measurement data. When detecting 3D measurement data, the method detects the The 3D measurement data of the tolerance zone. Background technique [0002] Measurement using a 3D scanner can be performed by a contact method of directly contacting an object to be measured. Furthermore, through a non-contact method of digitally processing an image obtained by photographing a target using an imaging device, shape information of the target can be obtained without physically touching the target. [0003] In the case of manufacturing semiconductor wafers, measuring precision instruments, and reproducing 3D images, for targets to be measured that are vulnerable to external pressure, or high-precision ultra-small parts, measurement using a 3D non-contact scanner is used to obtain such The shape informatio...

AI Technical Summary

Problems solved by technology

[0009] However, there is a problem with this measurement method of the above-mentioned prior art that it takes too much time during the measurement of the target because the user has to manually select the target points to be compared from the measurement data

[0010] Although there are methods to automatically select the target points to be compared from the measurement data, there are still reliability problems in this method, that is, whether these selected points are actually the points to be compared

[0011] Correspondingly, it is impossible for the user to know with certainty whether the comparison of the measured data is accurate

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