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Surface profile measuring instrument

A technology of surface shape and measuring device, applied in the field of surface shape measuring device

Active Publication Date: 2010-06-09
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For this reason, in order to control the detection signal to a reference value, the pressure of the contact part 212 on the object to be measured becomes stronger, so that the measurement force cannot be kept constant.
[0021] When the measurement force cannot be kept constant like this, the surface S of the object to be measured is damaged due to strong pressing, or the stylus 211 is bent and cannot Correctly detect the surface S of the measured object

Method used

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  • Surface profile measuring instrument
  • Surface profile measuring instrument
  • Surface profile measuring instrument

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0069] A first embodiment of the surface shape measuring device of the present invention will be described.

[0070] figure 1 It is a figure which shows the structure of 1st Embodiment of the surface profile measuring apparatus 100 of this invention.

[0071] As a first embodiment, a case where an object to be measured with an approximately flat surface is arranged approximately horizontally, and the probe 200 approaches the surface S of the object to be measured from above the surface S of the object to be measured is described.

[0072]The surface profile measuring device 100 includes: a probe 200 that detects the surface S of the object to be measured while moving the measuring portion 210 that touches the surface S of the object to be measured using a vertical drive mechanism 220; and a three-dimensional drive mechanism 300 that moves the probe 200 three-dimensionally. ; the vertical drive mechanism control unit 400 that controls and drives the vertical drive mechanism 2...

Deformed example 1

[0136] Next, refer to Figure 5 Modification 1 of the present invention will be described.

[0137] Modification 1 has the same basic structure as that of the first embodiment, and is characterized in that a switching control unit 444 including a switching control switching unit 440 automatically performs switching control based on a measurement force signal.

[0138] exist Figure 5 In Modification 1, a switching control unit 444 is provided instead of the switching operation unit 443 .

[0139] The measurement force signal from the measurement force detection circuit 219 is input to the switching control unit 444 , and the switching control unit 444 performs switching control of the switching unit 440 in accordance with changes in the measurement force signal. That is, when the contact portion 212 is pressed into the surface S of the object to be measured so that the measurement force is constant and the measurement force is specified for a predetermined profile during the...

Deformed example 2

[0145] In Modification 1 above, the case where switching control of the switching unit 440 is performed by the switching control unit 444 based on the measurement force signal from the measurement force detection circuit 219 has been described. The shape of the surface S of the measurement object performs switching control by the switching unit 440 .

[0146] When switching between profiling measurement and touch measurement according to the shape of the surface S of the object to be measured, the surface S of the object to be measured can also be estimated based on the latest measurement data that has been measured, and the profiling measurement or the touch measurement can be selected. For example, it is also possible to calculate the curvature or inclination angle of the surface S of the object to be measured from the latest data obtained at multiple points, and compare the curvature and inclination angle with a predetermined threshold to switch between profiling measurement...

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Abstract

Provided are a measuring section (210) including a vibrating contact-type probe having a measuring force detection circuit (219) which detects a measuring force acting to the contact portion (212); amoving unit (a three-dimensional drive mechanism (300), a vertical movement drive mechanism (220)) that moves the measuring section (210) relative to a workpiece surface (S); and a drive control unit(400) that controls the moving unit based on the magnitude of the measuring force output from the measuring force detection circuit (219). The drive control unit (400) includes: a scanning-measurementcontrol section (410) that moves for scanning the contact portion along the workpiece surface (S) with the measuring force maintained at the designated scanning measuring force; and a touching-measurement control section (420) that conducts touching-measurements on the workpiece surface (S) in a repeated manner, in the measurements the contact portion (212) being adapted to intermittently contactthe workpiece surface (S) at a touch detecting measuring force.

Description

technical field [0001] The invention relates to a surface shape measuring device. For example, it relates to a surface shape measuring device that detects the surface of an object to be measured with a contact probe to measure the shape of the surface of the object to be measured. Background technique [0002] Measuring devices that scan the surface of the object to measure the surface texture and three-dimensional shape of the object to be measured, for example, smoothness measuring instruments, contour measuring instruments, roundness measuring instruments, three-dimensional measuring instruments, etc., are known. [0003] In such a measuring device, a probe is used as a displacement sensor that detects the surface of the object to be measured based on the minute displacement of the contact portion when the contact portion touches the surface of the object to be measured (Document: Japanese Patent Application Laid-Open No. 2004-61322 Bulletin). [0004] Figure 9 The con...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B21/00G01B21/20G01B21/30
CPCG01B7/012G01B7/008G01B5/008
Inventor 松宫贞行伊贺崎史朗山县正意
Owner MITUTOYO CORP