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Ionizer with parts-extension unit

A technology for static eliminators and additional devices, applied to external electrostatic separators, parts of connecting devices, static electricity, etc., can solve problems such as inconvenient handling and installation troubles

Active Publication Date: 2007-06-13
SMC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in conventional static eliminators, when various related components as described above are added later, these related components cannot be easily installed.
In addition, even if you try to install these parts, the installation method of each part is different, so the installation is troublesome and cannot be handled easily.

Method used

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  • Ionizer with parts-extension unit
  • Ionizer with parts-extension unit
  • Ionizer with parts-extension unit

Examples

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Embodiment Construction

[0023] 1 to 4 show a first embodiment of the static eliminator of the present invention. This static eliminator 1A is a device for removing static electricity from the workpiece charged by static electricity in the process of processing workpieces such as semiconductor wafers. Negative ions are adsorbed when the workpiece is positively charged, and positive ions are adsorbed when the workpiece is negatively charged, thereby eliminating static electricity.

[0024] For above-mentioned static eliminator 1A, in the static eliminator body 2 that has one or more than one pair, preferably many pairs of positive and negative electrodes 11 for ion generation, 11, it is freely detachably installed for adding parts Accessories 3A. This auxiliary part 3A is a part for adding related parts such as sensors and filters to the above-mentioned static eliminator body 2. In the first embodiment, the above-mentioned auxiliary part 3A is used as a part for preventing the above-mentioned electrod...

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Abstract

An electrostatic eliminating device with a component adding device is provided, component mounting grooves is provided on two sides of an electrostatic eliminating device body, an auxiliary unit for component adding is detachably engaged on the component mounting grooves, components such as sensors, filters, etc., are added by the auxiliary unit. In the component mounting grooves, a lower groove wall is gradually sloped to a groove notch sid as an outward and downward shape, in addition, the auxiliary unit has a projection for engaging at front ends of left and right side walls. The auxiliary unit is mounted on the electrostatic eliminating device body by elastically engaging the projection with the component mounting grooves.

Description

technical field [0001] The present invention relates to a static eliminator for removing electricity from charged workpieces, and more specifically, to a static eliminator with a component extension device, which can add related components. Background technique [0002] In the process of processing workpieces such as semiconductor wafers, static eliminators are used to eliminate static electricity from workpieces charged by static electricity. In this static eliminator, for example, as shown in Patent Document 1, a positive electrode and a negative electrode are disposed in the electrode mounting opening on the bottom of the case, a positive pulse-shaped high voltage is applied to the positive electrode, and a negative pulse is applied to the negative electrode. A high voltage like that causes corona discharge to generate positive and negative ions from both electrodes. [0003] In this kind of static eliminator, due to its operating conditions and operating environment, it...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05F3/04
CPCH01R13/6485B03C3/383B03C3/017B03C3/12H01T19/04H01T23/00H05F3/04
Inventor 佐藤俊夫鈴木智土屋元
Owner SMC CORP
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