Apparatus for storing and moving a cassette

a cassette and apparatus technology, applied in the field of substrate processing, can solve the problems of increasing the cost of fabrication facilities, only a single cassette can be stored in the station,

a cassette and apparatus technology, applied in the field of substrate processing, can solve the problems of increasing the cost of fabrication facilities, only a single cassette can be stored in the station,

US20010043849A1Inactive Publication Date: 2001-11-22PERLOV ILYA +2
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  • Apparatus for storing and moving a cassette
  • Apparatus for storing and moving a cassette
  • Apparatus for storing and moving a cassette

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Embodiment Construction

[0024] In the following description, the term "substrate" broadly covers any object that is being processed in a semiconductor device processing system. The term "substrate" includes, for example, semiconductor wafers, flat panel displays, glass plates or disks, and plastic workpieces.

[0025] FIG. 1 is a top view of a processing station 20 of the present invention in which one or more substrates 10 are processed. The processing station 20 has a front-end staging area 22 which is separated from a loading and storage area 24 by a cleanroom wall 26. Cleanroom wall 26 separates a cleanroom 28, where loading and storage area 24 is located, from a gray area 30, where a processing system 32 is housed. The loading and storage area 24 is where cassettes of substrates are delivered and loaded / unloaded into / from the processing station 20. Processing system 32 may include one or more load lock chambers 34, a central transfer chamber 36, and a plurality of processing chambers 38. Inside processin...

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Abstract

A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.

Description

[0001] This application is a division of U.S. patent application Ser. No. 09 / 201,737 filed Dec. 1, 1998.[0002] 1. Field of the Invention[0003] The present invention relates generally to substrate processing, and more particularly to an apparatus for storing and moving substrate cassettes.[0004] 2. Background of the Related Art[0005] Semiconductor devices are made on substrates, such as silicon wafers or glass plates, for use in computers, monitors, and the like. These devices are made by a sequence of fabrication steps, such as thin film deposition, oxidation or nitration, etching, polishing, and thermal and lithographic processing. Although multiple fabrication steps may be performed in a single processing station, substrates must be transported between different processing stations for at least some of the fabrication steps.[0006] Substrates are stored in cassettes for transfer between processing stations and other locations. Although cassettes may be carried manually between proc...

Claims

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Application Information

Patent Timeline
22 Nov 2001
Publication
US20010043849A1
IPC
B65G1/00; B65G1/04; B65G49/07; H01L21/00; H01L21/673; H01L21/677; H01L21/687
CPC
H01L21/67167; H01L21/67769; H01L21/68707; Y10S414/14; H01L21/68
Inventors
PERLOV, ILYA; GANTVARG, EVGUENI