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Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck

Inactive Publication Date: 2005-01-20
IBIDEN CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0011] In consideration of the abovementioned problems, the objective of the present invention is to provide an aluminum nitride sintered body, a ceramic substrate, a ceramic heater and an electrostatic chuck, which have excellent mechanical strength and in which coming-off of ceramic particles from the main faces and the side surfaces thereof and generation of free particles are prevented. Another object of the present invention is to provide a ceramic substrate for a semiconductor producing / examining device and an electrostatic chuck, in which short circuit is prevented from occurring between conductors provided adjacent to each other in a direction perpendicular and a direction parallel to the substrate main faces inside the ceramic substrate.

Problems solved by technology

However, the tests performed by the inventors of the present invention have revealed that ceramic particles tend to come off from the main faces and the side surfaces of the abovementioned aluminum nitride sintered body, and thus the generated free particles attach to the semiconductor wafer, in the case of the ceramic substrate in which the aluminum nitride sintered body is used, thereby causing short circuits or disconnection of the circuit and the like formed on the semiconductor wafer.
Such short circuits or disconnection and the like may result in malfunction of the semiconductor.
Further, as the generated free particles prevent the semiconductor wafer from closely attaching to the ceramic substrate, there is a problem that the semiconductor wafer is heated with an uneven temperature distribution thereof.
When any fracture occurs in such a ceramic substrate, the sectional view of the fracture exhibits intergranular fracture and thus the ceramic substrate exhibits deteriorated mechanical properties such as deteriorated bending strength at a high temperature.

Method used

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  • Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck
  • Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck
  • Aluminum nitride sintered body, ceramic substrate, ceramic heater and electrostatic chuck

Examples

Experimental program
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Effect test

examples 1-7

Production of a Ceramic Heater having a Resistance Heating Element Formed at the External Portion thereof (Reference to FIG. 3 and 11)

[0470] (1) A composition containing: 100 parts by weight of aluminum nitride powder (the average particle diameter: 1.1 μm, produced by Tokuyama Co.); 5 parts by weight (example 1), 10 parts by weight (example 2 ), 20 parts by weight (example 3), 30 parts by weight (example 4), 42 parts by weight (example 5), 42 parts by weight (example 6), 86 parts by weight (example 7) of alumna; 1.17×10−4 parts by weight (example 1), 4.7×10−4 parts by weight (example 2 ), 2.3×10−3 parts by weight (example 3), 0.023 parts by weight (example 4), 0.07 parts by weight (example 5), 0.12 parts by weight (example 6), 0.19 parts by weight (example 7) of CaS; 120 parts by weight of acrylic binder; and alcohol was prepared. By spray drying the obtained composition, seven types of granular powder were produced.

[0471] (2) The granular powder was filled in a mold and formed s...

example 8

Production of a Ceramic Heater having a Resistance Heating Element formed at the External Portion thereof (Reference to FIG. 3 and FIG. 11)

[0498] (1) A composition containing: 100 parts by weight of aluminum nitride powder (the average particle diameter: 0.6 μm); 0.3 parts by weight of yttria (the average particle diameter: 0.4 m) 12 parts by weight of acrylic binder; and alcohol was prepared. By spray drying the obtained composition, granular powder was produced.

[0499] (2) Next, the granular powder was filled in a mold and formed so as to have a plate-like shape, whereby a formed body (green) was obtained.

[0500] (3) The formed body which had been subjected to the processing treatment was then hot-pressed for 3 hours at 1700° C. under a pressure of 20 MPa, whereby an aluminum nitride plate-shaped body of 3 mm thickness was obtained.

[0501] Next, a disc-shaped body having a diameter of 210 mm was cut out from the plate-shaped body, whereby a plate-shaped body made of ceramic (a ce...

example 9

Production of a Ceramic Heater having a Resistance Heating Element Inside thereof (Reference to FIG. 1, FIG. 2 and FIG. 12)

[0509] (1) A paste was produced by mixing: 100 parts by weight of aluminum nitride powder (manufactured by Tokuyama Co., the average particle diameter: 0.6 μm); 0.2 parts by weight of yttria (the average particle diameter: 0.4 μm); 11.5 parts by weight of acrylic binder; 0.5 parts by weight of a dispersant; and 53 parts by weight of alcohol comprising 1-butanol and ethanol. By using the obtained paste and performing the forming process according to the doctor blade method, a green sheet 60 having a thickness of 0.47 mm was obtained.

[0510] (2) Next, the green sheet was dried for five hours at 80° C. Thereafter, a portion which was to serve as a conductor filled through hole for connecting the resistance heating element and a terminal pin was formed by punching.

[0511] (3) A conductor containing paste A was prepared by mixing: 100 parts by weight of tungsten car...

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Abstract

The object of the present invention is to provide an aluminum nitride sintered body which has excellent mechanical strength and in which ceramic particles is prevented from coming off from the surface and / or side thereof and generation of free particles is suppressed. The aluminum nitride sintered body of the present invention is wherein it contains sulfur.

Description

TECHNICAL FIELD [0001] The present invention relates to an aluminum nitride sintered body which is suitable for a ceramic substrate used in a device for producing / examining a semiconductor such as a hot plate (a ceramic heater), an electrostatic chuck, a wafer prober and the like, as well as to a ceramic substrate produced by forming a conductor inside or on the surface of ceramic of said sintered body and the like, a ceramic heater and an electrostatic chuck using said ceramic substrate. BACKGROUND ART [0002] In a semiconductor producing / examining device including an etching device, a chemical vapor deposition device and the like, a heater, a wafer prober and the like using a metal base material such as stainless steel, aluminum alloy and the like have conventionally been employed. [0003] However, in the case of such a metal heater, there was a problem that the temperature controlling property is not good and the body thereof becomes heavy and bulky due to the increased thickness, ...

Claims

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Application Information

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IPC IPC(8): C04B35/08C04B35/10C04B35/14C04B35/565C04B35/575C04B35/581C04B35/583C04B35/584H01L21/00H01L21/68H01L21/683H05B3/14H05B3/74
CPCB32B18/00Y10T428/26B32B2038/042B32B2311/08C04B35/08C04B35/10C04B35/14C04B35/5607C04B35/5611C04B35/5622C04B35/5626C04B35/565C04B35/575C04B35/58014C04B35/581C04B35/583C04B35/584C04B35/6264C04B35/6303C04B2235/3201C04B2235/3217C04B2235/3225C04B2235/3418C04B2235/3821C04B2235/386C04B2235/3865C04B2235/3873C04B2235/422C04B2235/446C04B2235/5436C04B2235/5445C04B2235/6025C04B2235/721C04B2235/723C04B2235/726C04B2235/728C04B2235/77C04B2235/786C04B2235/96C04B2235/9607C04B2237/408C04B2237/50C04B2237/62C04B2237/704H01L21/67103H01L21/67109H01L21/6833H01L21/6835H01L2924/19041H05B3/143H05B3/74H05B3/746Y10T428/265Y10T428/252Y10T428/25B32B38/145
Inventor HIRAMATSU, YASUJIITO, YASUTAKA
Owner IBIDEN CO LTD
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