Thermal physical vapor deposition source using pellets of organic material for making OLED displays

Abstract

A thermal physical vapor deposition source for vaporizing compacted pellets of organic materials onto a surface of a substrate in forming a display, including a housing defining a plurality of spaced passages each for receiving compacted pellets, a cover plate over the housing, with a first plurality of openings corresponding to the spaced passages of the housing and an electrical heater structure disposed over the cover plate. The thermal physical vapor deposition source further including an aperture plate, disposed over the electrical heater structure, an electrically insulating spacer member located between the electrical heater structure and an aperture plate, and circuitry for applying current to the electrical heater structure to produce heat sufficient to vaporize the pellets and permit vapor efflux of materials to pass through the cover plate, the heater structure, the electrically insulating spacer member and the aperture plate, onto the substrate.

Description

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AI Technical Summary

Benefits of technology

The present invention has two main benefits: it allows for larger structures to have evenly distributed layers made up of both an active ingredient and a diluent material through thermally driven processes (thermal physical vapor deposition). Additionally, this technology enables extended periods of evaporation compared to traditional methods where components are simultaneously heated together. This results in more efficient use of the substrate being processed during production.

Problems solved by technology

The patent text discusses the problem of non-uniformity in the deposition of organic materials in devices such as organic light-emitting devices. This can be caused by the use of a point source or a linear source of vaporization. The text describes various methods for improving the uniformity of the deposition, such as using a gas curtain or a reactor vessel. The technical problem addressed in the patent text is to provide a more uniform layer thickness of the organic layer in such devices.

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