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Defect identification system and method for repairing killer defects in semiconductor devices

Inactive Publication Date: 2005-11-17
AGERE SYST INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A change in the distribution of defects can indicate a yield problem.
Therefore, by monitoring inspection data, the yield problem may be detected in a timely manner.
Many types of defects may arise during manufacturing.

Method used

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  • Defect identification system and method for repairing killer defects in semiconductor devices
  • Defect identification system and method for repairing killer defects in semiconductor devices
  • Defect identification system and method for repairing killer defects in semiconductor devices

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Embodiment Construction

[0011] The majority of the yield lost for integrated circuits is due to defects that are of sub-micron size, short elements of a single mask level (such as metal or gate stack runners) together or create opens at the same levels and can be detected using in-line inspection tools. The shorting mechanisms include metal to metal shorts in either copper or aluminum technologies, gate-stack to gate-stack shorts, gate-stack to window shorts and active region to active region shorts. In-line inspection tools are capable of detecting and locating most of these shorted conditions. For example, U.S. Pat. No. 6,047,083 describes a method and apparatus for pattern inspection that can be used to identify killer defects on semiconductor dies. Most killer defects create a single short between two adjacent elements and therefore only need a minor repair to become non-yield limiting. However, the present invention contemplates that killer defects that cause shorts between more than two elements coul...

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Abstract

A method for improving semiconductor yield by in-line repair of defects during manufacturing comprises inspecting dies on a wafer after a selected layer is formed on the dies, identifying defects in each of the dies, classifying the identified defects as killer or non-critical, for each killer defect determining an action to correct the defect, repairing the defect and returning the wafer to a next process step. Also disclosed is a method for determining an efficient repair process by dividing the die into a grid and using analysis of the grid to find a least invasive repair.

Description

SPECIFIC DATA RELATED TO THE INVENTION [0001] This application claims the benefit of U.S. Provisional Application No. 60 / 571,435, filed May 14, 2004.TECHNICAL FIELD OF THE INVENTION [0002] The present invention is directed, in general, to semiconductor fabrication and, more specifically, to an in-line defect identification system and method for repairing killer defects in semiconductor devices upon detection. BACKGROUND OF THE INVENTION [0003] In the realm of semiconductor fabrication, systems and methods for maximizing chip yield are critical to the success of a semiconductor manufacturing company. Higher yields allows companies to distribute the manufacturing costs over a greater quantity of products, thereby reducing the sales price or increasing the profit margin. [0004] Optical, laser-based and SEM inspection tools are key pieces of equipment for yield maintenance and improvement. They are used to inspect wafers for defects at numerous points in the production process. Their da...

Claims

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Application Information

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IPC IPC(8): G01R31/26G01R31/28H01L21/66H01L21/768
CPCG01R31/2894H01L22/20H01L21/76892
Inventor PATTERSON, OLIVER DESMONDSHUTTLEWORTH, DAVID M.ALBERS, BRADLEY J.WECK, WERNERBROWN, GREGORY
Owner AGERE SYST INC
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