Split coil linear motor for z force

a linear motor and z force technology, applied in the field of actuators, can solve the problems of inability to use the additional linear motor, components that cannot be compactly sized, and lack of available spa

Inactive Publication Date: 2006-03-09
NIKON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The lack of available space often forces components to be sized as compactly as possible.
While the use of linear motor 200 and an additional linear motor may be effective in allowing an object to move in both x-direction 206a and z-direction 206c, the use of the additional linear motor may not always be possible due to space constraints within an overall system.
Further, the use of an additional linear motor may cause issues associated with the addition of mass to the overall system, and the generation of heat within the overall system.
As will be appreciated by those skilled in the art, additional mass may cause vibrations within the overall system, while additional heat may adversely affect the performance of various components, e.g., sensors, within the overall system.
However, a planar motor is generally more complicated to control than a linear motor.
Further, since many systems are arranged to use linear motors, the use of a planar motor instead of one or more linear motors may be impractical.

Method used

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  • Split coil linear motor for z force
  • Split coil linear motor for z force
  • Split coil linear motor for z force

Examples

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Embodiment Construction

[0028] Many systems such as photolithography systems used in semiconductor wafer processing have spatial constraints. It is often not possible to add additional components such as actuators to the systems due to a lack of space. By way of example, when it is desired for an object that is coupled to a linear motor, i.e., a linear motor which is arranged to enable force to be generated along an x-axis, to be moved along a z-axis, it may not be possible to couple another linear motor, i.e., a linear motor which is arranged to enable force to be generated along a z-axis, to the object. When the addition of another linear motor is not possible, then the overall performance of the system which includes the object may be compromised, as the object may not be moved along the z-axis as desired.

[0029] Configuring an actuator such as a linear motor to provide a non-zero net force along both an x-axis and a z-axis allows forces to be applied along both axes substantially without requiring the ...

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PUM

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Abstract

Methods and apparatus for enabling a coil to be used to provide a net force along more than one axis are disclosed. According to one aspect of the present invention, an actuator includes a magnet assembly and a coil assembly. The coil assembly moves at least partially within the magnet arrangement, and includes a top coil half and a bottom coil half. The top coil half and the bottom coil half are independently controllable such that a first current applied to the top coil half may be independently applied from a second current applied to the bottom coil half.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of Invention [0002] The present invention relates generally to actuators. More particularly, the present invention relates to a coil design which enables an actuator such as a linear motor to provide a net force in along both an x-axis and a z-axis. [0003] 2. Description of the Related Art [0004] For many machines or instruments such as photolithography machines which are used in semiconductor processing, space is often at a premium. The lack of available space often forces components to be sized as compactly as possible. As a result, restricting the size of a component that is arranged to provide a particular force or motion allows the space in an overall machine to be efficiently utilized. [0005] Many machines include linear motors which may be used to provide a force that is used to drive an object or a structure, e.g., a stage of a photolithography machine. FIG. 1 is a diagrammatic representation of a typical linear motor. A linear mot...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H02K41/00
CPCG03F7/70758H02N15/00H02K2201/18H02K41/03
Inventor BINNARD, MICHAEL B.
Owner NIKON CORP
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