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Unique Method for Manufacturing a Digital Micromirror Device and a Method of Manufacturing a Projection Display System Using the Same

a technology of digital micromirrors and manufacturing methods, applied in the field of digital micromirrors, can solve the problems of time-consuming and costly problems

Inactive Publication Date: 2009-02-12
TEXAS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This method reduces trenching into the spacer layer, maintains ultra-flat mirror surfaces, and supports hinge structures with critical dimensions below 0.3 microns, preventing sag and pre-torque issues, thus improving the manufacturing efficiency and quality of DMDs.

Problems solved by technology

Unfortunately, the manufacture of the elements of the superstructure may require many different steps, thus it can be time consuming and costly.

Method used

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  • Unique Method for Manufacturing a Digital Micromirror Device and a Method of Manufacturing a Projection Display System Using the Same
  • Unique Method for Manufacturing a Digital Micromirror Device and a Method of Manufacturing a Projection Display System Using the Same
  • Unique Method for Manufacturing a Digital Micromirror Device and a Method of Manufacturing a Projection Display System Using the Same

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Embodiment Construction

[0014]Turning to FIGS. 1A-10B illustrated are cross-sectional views and plan views illustrating how one skilled in the art might manufacture a digital micromirror device (DMD) in accordance with the principles of the present invention. Each of the given stages of manufacture is broken into a cross-sectional view (denoted as A) and a plan view (denoted as B). For example, at a given stage of manufacture, such as shown in FIG. 1, FIG. 1B is a plan view of the partially completed DMD and FIG. 1A is a cross-sectional view of the partially completed DMD taken through the section A-A illustrated in FIG. 1B. The same denotation is carried out throughout the majority of the document, including FIGS. 2A-10B. Accordingly, where like reference numbers are used, even if in different FIGUREs, the same feature is being illustrated.

[0015]Turning initially to FIGS. 1A and 1B, illustrated are a cross-sectional view and a plan view, respectively, of a DMD 100 at an initial stage of manufacture. The D...

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Abstract

The present invention provides a method for manufacturing a digital micromirror device and a method for manufacturing a projection display system. The method for manufacturing the digital micromirror device, without limitation, may include providing a material stack, the material stack including a spacer layer having one or more openings therein and located over control circuitry located on or in a semiconductor substrate, a layer of hinge material located over the spacer layer and within the one or more openings, and a layer of hinge support material located over the layer of hinge material and within the one or more openings. The method may further include patterning the layer of hinge support material using photoresist, patterning the layer of hinge material using the patterned layer of hinge support material as a hardmask, and removing the patterned layer of hinge support material from over an upper surface of the patterned layer of hinge material.

Description

TECHNICAL FIELD OF THE INVENTION[0001]The present invention is directed, in general, to a digital micromirror device and, more specifically, to a unique method for manufacturing a digital micromirror device and a method for manufacturing a projection display system using the same.BACKGROUND OF THE INVENTION[0002]A Digital Micromirror Device (DMD) is a type of microelectromechanical systems (MEMS) device. Invented in 1987 at Texas Instruments Incorporated, the DMD is a fast, reflective digital light switch. It can be combined with image processing, memory, a light source, and optics to form a digital light processing® system capable of projecting large, bright, high-contrast color images.[0003]The DMD is fabricated using CMOS-like processes over a CMOS memory. It has an array of individually addressable mirror elements, each having an aluminum mirror that can reflect light in one of two directions depending on the state of an underlying memory cell. With the memory cell in a first st...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): G02B26/00
CPCG02B26/0841
Inventor DICARLO, ANTHONYMEISNER, STEPHEN
Owner TEXAS INSTR INC
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