Method of manufacturing stamper
a manufacturing method and stamper technology, applied in the field of manufacturing methods of stampers, can solve the problems of increasing the repeatable runout (rro) of the discrete track recording medium, and the stress applied to the side wall of each resist pattern b>32/b>/i> is not uniform
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example 1
[0054]FIG. 1A shows resist patterns in a conventional preamble section and FIG. 1B shows resist patterns in a preamble section in this example.
[0055]As shown in FIG. 1B, the preamble section in this example is prepared by inserting a string of redundant bits 212 between resist patterns 211 in a conventional preamble section. In this example, one string of redundant bits 212 is inserted between every two strings of resist patterns 211. In the string of redundant bits 212, the bits are changed to be 1010 in the radial direction.
[0056]The resist pattern 211 in the conventional preamble section has a long shape extending in the radial direction and is easily deformed when the compressive stress produced in the Ni electroforming film during electroforming is applied thereto. In a string of redundant bits 212, on the other hand, since the bits are arranged to be 1010 in the radial direction, the compressive stress produced in the Ni electroforming film during electroforming can be dispers...
example 2
[0057]FIG. 2A shows resist patterns in a conventional address section and FIG. 2B shows resist patterns in the address section in this example.
[0058]The resist patterns 221 of the address section shown in FIG. 2A are formed using Gray codes. As shown in FIG. 2B, the address section in this Example is obtained by inserting a string of redundant bits 222 between the resist patterns 221 of the conventional address section. In this example, one array of redundant bits 222 is inserted every one array of resist patterns 221. In the array of redundant bits 212, the bits are changed to be 1010 in the radial direction.
[0059]In this example, insertion of a string of redundant bits 222 between the resist patterns 221 makes it possible to suppress the deformation of the resist patterns in the whole address section, with the result that RRO of the DTR medium finally manufactured can be reduced.
example 3
[0060]FIG. 3 shows resist patterns in the preamble section in this example. The resist patterns 211a in the preamble section in this example are separated by recesses in the radial direction, which are formed in the same manner as those in the track areas 1.
[0061]Formation of the resist patterns 211a separated by recesses in the radial direction makes it possible to suppress the deformation of the resist patterns in the whole preamble section, with the result that RRO of a DTR medium finally manufactured can be reduced.
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