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Position measuring device

Active Publication Date: 2016-03-17
MITUTOYO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides a position measuring device with a simple and compact structure that can accurately measure a position on a surface of a measurement object quickly. This is achieved by using a hologram and a lens to expand the hologram image during detection. The device can change the range and resolution of position detection depending on the angle of the hologram. This allows for precise position measurement in different situations.

Problems solved by technology

The position measuring device disclosed in JP 2002-139311 A, however, is optically and structurally complex and increases its size because the distance measuring device needs to increase the focal length of the lens and is subject to constraints such as an angle of incidence on the light receiver according to the Scheimpflug principle.
Thus, this device has only a small measuring range and is subject to various constraints on device configuration, and the device takes a lot of time to measure over a large area of the measurement object.

Method used

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Experimental program
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first embodiment

[0028]FIG. 1 is a configuration diagram illustrating a position measuring device according to a first embodiment.

[0029]As illustrated in FIG. 1, a position measuring device 1 according to the present embodiment includes a light emitter 10, a hologram 20, a light receiver 30, and a measurement unit 40. The position measuring device 1 irradiates a workpiece W as an object with a laser light LS1 and receives light reflected and scattered by a surface of the workpiece W (hereinafter referred to as “detection light LS2”). Thus, the position measuring device 1 measures a position on the surface of the workpiece W at which the laser light LS1 is incident in a non-contact manner.

[0030]The light emitter 10 has a laser light source configured to emit the laser light LS1. The light emitter 10 emits the laser light LS1 toward the workpiece W during measurement.

[0031]The hologram 20 is positioned at a position where the hologram 20 does not intercept the optical axis c of the laser light LS1 emi...

second embodiment

[0059]A position measuring device according to a second embodiment will now be described.

[0060]FIGS. 6A and 6B are configuration diagrams illustrating a position measuring device according to the second embodiment.

[0061]As illustrated in FIGS. 6A and 6B, a position measuring device 1B according to the present embodiment is different from the position measuring device 1 according to the first embodiment in the configuration of a hologram 21. The position measuring device 1B also includes a drive mechanism 60 for the hologram 21. Other configurations are the same as the position measuring device 1.

[0062]The hologram 21 used in the position measuring device 1B has a first area 211 and a second area 212. The first area 211 is an area that generates a first inclined surface inclined at a first angle relative to the optical axis c of the laser light LS1 as a reconstructed image. The second area 212 is an area that generates a second inclined surface inclined at a second angle different fr...

third embodiment

[0068]A position measuring device according to a third embodiment will now be described.

[0069]FIG. 7 is a configuration diagram illustrating a position measuring device according to the third embodiment.

[0070]As illustrated in FIG. 7, a position measuring device 1C includes a lens 70 between the hologram 20 and the light receiver 30. Other configurations are the same as the position measuring device 1 according to the first embodiment.

[0071]The lens 70 has a characteristic of expanding the reconstructed image generated by the hologram 20. Such a lens 70 allows the light receiver 30 to capture a change in the image position of the hologram 20 associated with a change in the position of the workpiece W under magnification when the position of the workpiece W is measured. This makes it possible to detect a small height change in the position of the workpiece W with high accuracy.

[0072]As described above, the position measuring devices 1, 1B, and 1C according to the embodiments can meas...

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PUM

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Abstract

A position measuring device of the invention includes a light emitter configured to emit a laser light, a hologram configured to generate a reconstructed image of an inclined surface relative to an optical axis, a light receiver disposed on a reconstructed image forming surface of the hologram, and a measurement unit configured to measure a position of an object based on a position of light received by the light receiver. In the position measuring device of the invention, the light emitter may emit a linear laser light and the light receiver may include an image sensor having a two-dimensional array of pixels.

Description

CROSS-REFERENCE TO RELATED APPLICATION[0001]This non-provisional application claims priority under 35 U.S.C. §119(a) from Japanese Patent Application No. 2014-185937, filed on Sep. 12, 2014, the entire contents of which are incorporated herein by reference.BACKGROUND[0002]1. Technical Field[0003]The present invention relates to a position measuring device that receives reflected and scattered light of a laser light with which a surface of an object is irradiated and measures a position on the surface of the object.[0004]2. Related Art[0005]A position measuring device is known in the art which irradiates a surface of a measurement object with a laser light, causes an image sensor to receive reflected and scattered light, and calculates a position on the surface of the measurement object using triangulation (e.g., see JP 2002-139311 A).[0006]FIG. 8 is a schematic diagram illustrating a non-contact position measuring device using triangulation. As illustrated in FIG. 8, this position m...

Claims

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Application Information

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IPC IPC(8): G01B11/14
CPCG01B11/14G01B11/002
Inventor TAKAI, TOSHIHISA
Owner MITUTOYO CORP