Absolute distance measurement method and system using optical frequency generator

Abstract

The present invention relates to absolute distance measurement method and system using an optical frequency generator. The absolute distance measurement method using the optical frequency generator includes (a) generating a plurality of different stabilized wavelengths by using the optical frequency generator; (b) obtaining an initial estimation value of a distance to be measured by using a frequency sweeping interferometer; (c) analyzing an uncertainty range of the obtained initial estimation value; (d) measuring excess fraction parts of the different wavelengths by analyzing interference signals for each of the wavelengths; (e) determining integer parts for each of the different wavelengths within the uncertainty range of the initial estimation value; and (f) measuring an absolute distance to be measured by using the excess fraction part and the integer parts for each of the different wavelengths.

Description

TECHNICAL FIELD[0001]The present invention relates to absolute distance measurement method and system using an optical frequency generator.BACKGROUND ART[0002]An absolute distance metrology is a method of measuring a desired distance at once without the motion of a measurement target. Currently, widely used length measuring instruments based on interference principles measure the relative displacement between an initial position and an end position of the measurement target by continuously integrating a phase variation of an interference pattern caused by the motion of the measurement target.[0003]This method is a measurement method to be traceable to a length standard with high measurement uncertainty since an optical frequency comb of a femtosecond pulse laser can be used as a ruler. This method has an advantage in that measurement may be rapidly executed without a complicated calculation process.[0004]However, the measurement target has to be moved as far as you want when measuri...

AI Technical Summary

Benefits of technology

[0009]The present invention is contrived to solve the above-mentioned problems and an advantage of the present invention is that it provides absolute distance measurement method and system using an optical frequency generator which can measure an absolute distance with maintaining high measurement uncertainty characteristics of an optical interferometer for an existing relative displacement measurement while expanding a measurement range which was limited by the existing stability and accuracy of wavelengths based on the principle of the multi-wavelength interferometer integrally applying the principle of the frequency sweeping interferometer by generating a plurality of wavelengths with high frequency stability and accuracy from the optical frequency generator.

[0010]Other objects and advantages of the present invention can be understood by the following description, and become apparent with reference to the embodiments of the present invention. Also, it is obvious to those skilled in the art of the present invention that the objects and advantages of the present invention can be realized by the means as claimed and combinations thereof.Technical Solution

[0011]In order to achieve the above-mentioned object, in accordance with an aspect of the present invention, there is provided an absolute distance measurement method using an optical frequency generator including the steps of: (a) generating a plurality of different stabilized wavelengths by using the optical frequency generator; (b) obtaining an initial estimation value of a distance to be measured by using a frequency sweeping interferometer; (c) analyzing an uncertainty range of the obtained initial estimation value; (d) measuring excess fraction parts of the different wavelengths by analyzing interference signals for each of the wavelengths; (e) determining integer parts for each of the different wavelengths within the uncertainty range of the initial estimation value; and (f) measuring an absolute distance to be measured by using the excess fraction parts and the integer parts for each of the different wavelengths.

[0012]The step (a) includes the steps of: (a1) generating a beat frequency between a single-wavelength laser generated from an external cavity laser diode (ECLD) and the optical comb of a femtosecond laser; (a2) generating an electrical control signal for synchronizing the beat frequency with a predetermined reference frequency from a phase locked loop (PLL) to transmit the generated electrical control signal to the external cavity laser diode; and (a3) generating stabilized wavelengths according to the electrical control signal transmitted from the phase locked loop (PLL) in the external cavity laser diode.

[0013]The step (a) includes the steps of: (a1) extracting a single frequency mode from the optical comb of a femtosecond laser; (a2) applying the extracted single frequency mode to a laser diode; and (a3) generating a stabilized frequency by amplifying the light applied to the laser diode.

[0014]In order to achieve the object mentioned above, in accordance with another aspect of the invention, an absolute distance measurement system using an optical frequency generator includes: an optical frequency generating module for generating a plurality of different stabilized wavelengths and sweeping frequency continuously from a first wavelength λ1 to a second wavelength λ2 among the plurality of different wavelengths; and an interferometer module for measuring each of excess fraction parts for the different wavelengths emitted from the optical frequency generating module and measuring a phase difference Δφ between two wavelengths by sweeping frequency continuously from the first wavelength λ1 to the second wavelength λ2.

Problems solved by technology

However, the measurement target has to be moved as far as you want when measuring a distance due to phase ambiguity.

Since the phase variation is continuously integrated, various error components during the measurement are also accumulated.

The previous absolute distance interferometry could not achieve measurement uncertainty of a level which can be obtained in a relative displacement measurement due to technical problems such as the stability of the wavelengths in use, an algorithm error, and the like.

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