The invention discloses a
corrosion inhibition developing solution and a preparation method and application thereof.The
corrosion inhibition developing solution is prepared from
quaternary ammonium hydroxide,
binary acid, organic amine, polyhydric
alcohol, a
wetting agent, a stabilizer and water, through the synergistic effect of all the components, the
corrosion speed of the corrosion inhibition developing solution on a
metal aluminum substrate is low, and the corrosion inhibition developing solution has the good corrosion inhibition effect on the
metal aluminum substrate. The problem of poor patterns caused by development of
metal sensitive to alkali can be improved, meanwhile, the developing performance of the developing solution is excellent, and the loss of an unexposed region is smaller. In addition, the
photoresist which can be developed by the anti-corrosion developing solution disclosed by the invention can be in a
negative type and a
positive type, and the type of the
photoresist is not specially limited. According to the invention, the developing solution is prepared by using the
wetting agent, so that the
surface tension of the whole developing
solution system can be obviously reduced under the condition that no surfactant except
quaternary ammonium hydroxide is used, and the defect that the
surface tension of the traditional developing solution is too large and the
photoresist cannot be fully infiltrated is overcome; and the developing effect is not influenced by excessive foam.