The invention discloses a
wafer combination carrier, and relates to the technical field of
semiconductor manufacturing, the
wafer combination carrier comprises a carrier upper bottom plate and a carrier lower bottom plate, a sealing strip is fixedly installed on the inner wall of the carrier lower bottom plate, a plurality of magnets are fixedly embedded in the top surface of the carrier upper bottom plate, the top surface of the carrier lower bottom plate is attracted with the embedded magnets, and the sealing strip is fixedly installed on the inner wall of the carrier lower bottom plate. A flaky product is arranged in the carrier lower bottom plate, a plurality of positioning pins are fixedly mounted on the bottom surface of the carrier upper bottom plate, a plurality of
insertion holes are formed in the top surface of the carrier lower bottom plate, and the positioning pins are matched with the
insertion holes; according to the
wafer carrier, the detection assemblies are combined with the adjusting mechanism, the
automation and intelligence level of the wafer carrier is improved, the position detection precision and the adjusting accuracy are remarkably improved, and higher production efficiency and sheet product quality are brought to the wafer manufacturing industry.